High contact angle topcoat material and use thereof in lithography process
SUNDBERG LINDA KARIN, TRUONG HOA D, BROCK PHILLIP JOE, ALLEN ROBERT DAVID, SOORIYAKUMARAN RATNAM, LARSON CARL E
Year of Publication 11.10.2011
Get full text
Year of Publication 11.10.2011
Patent
High contact angle topcoat material and use thereof in lithography process
Allen, Robert David, Brock, Phillip Joe, Larson, Carl E, Sooriyakumaran, Ratnam, Sundberg, Linda Karin, Truong, Hoa D
Year of Publication 11.10.2011
Get full text
Year of Publication 11.10.2011
Patent
Methods of directed self-assembly with 193 - nm immersion lithography and layered structures formed therefrom
LINDA KARIN SUNDBERG, GREGORY MICHAEL WALLRAFF, HIROSHI ITO, DANIEL PAUL SANDERS, WILLIAM HINSBERG, HOOL KIM, HOA TRUONG, JOY CHENG, YOUNG-HYE NA
Year of Publication 22.08.2012
Get full text
Year of Publication 22.08.2012
Patent
WATER CASTABLE - WATER STRIPPABLE TOP COATS FOR 193 NM IMMERSION LITHOGRAPHY
CHA, JENNIFER, BROCK, PHILIP, JOE, GIL, DARIO, WALLRAFF, GREGORY, LARSON, CARL, ERIC, SUNDBERG, LINDA, KARIN
Year of Publication 09.12.2009
Get full text
Year of Publication 09.12.2009
Patent
Immersion topcoat materials with improved performance
SUNDBERG LINDA KARIN, WALLRAFF GREGORY MICHAEL, BROCK PHILLIP JOE, GIL DARIO, LARSON CARL ERIC, ALLEN ROBERT DAVID, HINSBERG WILLIAM DINAN
Year of Publication 21.12.2010
Get full text
Year of Publication 21.12.2010
Patent
Immersion topcoat materials with improved performance
Allen, Robert David, Brock, Phillip Joe, Gil, Dario, Hinsberg, William Dinan, Larson, Carl Eric, Sundberg, Linda Karin, Wallraff, Gregory Michael
Year of Publication 21.12.2010
Get full text
Year of Publication 21.12.2010
Patent
TOPCOAT MATERIALS FOR IMMERSION LITHOGRAPHY
BROCK, PHILLIP, JOE, WALLRAFF, GREGORY, MICHAEL, GIL, DARIO, HINSBERG, WILLIAM, DINAN, LARSON, CARL, ERIC, ALLEN, ROBERT, DAVID, SUNDBERG, LINDA, KARIN
Year of Publication 14.07.2010
Get full text
Year of Publication 14.07.2010
Patent
METHODS OF DIRECTED SELF-ASSEMBLY WITH 193 - NM IMMERSION LITHOGRAPHY AND LAYERED STRUCTURES FORMED THEREFROM
ITO, HIROSHI, CHENG, JOY, WALLRAFF, GREGORY, MICHAEL, KIM, HOOL, NA, YOUNG-HYE, SANDERS, DANIEL, PAUL, TRUONG, HOA, SUNDBERG, LINDA, KARIN, HINSBERG, WILLIAM
Year of Publication 23.06.2011
Get full text
Year of Publication 23.06.2011
Patent
METHODS OF DIRECTED SELF-ASSEMBLY AND LAYERED STRUCTURES FORMED THEREFROM
SUNDBERG LINDA KARIN, WALLRAFF GREGORY MICHAEL, TRUONG HOA D, ITO ATSUKO, ITO HIROSHI, NA YOUNG-HYE, HINSBERG WILLIAM D, SANDERS DANIEL P, KIM HOOL, CHENG JOY
Year of Publication 23.06.2011
Get full text
Year of Publication 23.06.2011
Patent
WATER CASTABLE - WATER STRIPPABLE TOP COATS FOR 193 NM IMMERSION LITHOGRAPHY
CHA, JENNIFER, BROCK, PHILIP, JOE, GIL, DARIO, WALLRAFF, GREGORY, LARSON, CARL, ERIC, SUNDBERG, LINDA, KARIN
Year of Publication 06.08.2008
Get full text
Year of Publication 06.08.2008
Patent
WATER CASTABLE - WATER STRIPPABLE TOP COATS FOR 193 NM IMMERSION LITHOGRAPHY
WALLRAFF GREGORY, SUNDBERG LINDA KARIN, CHA JENNIFER, BROCK PHILIP JOE, GIL DARIO, LARSON CARL ERIC
Year of Publication 23.07.2008
Get full text
Year of Publication 23.07.2008
Patent
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
MAGBITANG TEDDIE PEREGRINO, SUNDBERG LINDA KARIN, SANKARAPANDIAN MUTHUMANICKAM, HEDRICK JAMES LUPTON, DUBOIS GERAUD JEAN-MICHEL, VOLKSEN WILLI, LEE VICTOR YEE-WAY, KIM HOOL, MILLER ROBERT DENNIS
Year of Publication 26.04.2011
Get full text
Year of Publication 26.04.2011
Patent
Low-K interlevel dielectric materials and method of forming low-K interlevel dielectric layers and structures
Dubois, Geraud Jean-Michel, Hedrick, James Lupton, Kim, Ho-Cheol, Lee, Victor Yee-Way, Magbitang, Teddie Peregrino, Miller, Robert Dennis, Sankarapandian, Muthumanickam, Sundberg, Linda Karin, Volksen, Willi
Year of Publication 26.04.2011
Get full text
Year of Publication 26.04.2011
Patent
Negativresistzusammensetzungen und multifunktionelle Polymere darin
Sundberg, Linda Karin, Domon, Daisuke, Masunaga, Keiichi, Sooriyakumaran, Ratnam, Kawai, Yoshio, Bozano, Luisa, Dominica, Sanchez, Martha, Inez, Sanders, Daniel Paul, Watanabe, Satoshi
Year of Publication 13.04.2017
Get full text
Year of Publication 13.04.2017
Patent