반도체 구조체들에서의 스트레인의 측정을 위한 스캐터로메트리 기반 방법들 및 시스템들
ROSENBERG AARON J, LIN SHAWN KAI HSIANG, TAN ZHENGQUAN, CHOUAIB HOUSSAM, HU DAWEI
Year of Publication 28.07.2021
Get full text
Year of Publication 28.07.2021
Patent
SCATTEROMETRY BASED METHODS AND SYSTEMS FOR MEASUREMENT OF STRAIN IN SEMICONDUCTOR STRUCTURES
TAN, Zhengquan, LIN, Shawn Kai-Hsiang, CHOUAIB, Houssam, HU, Dawei, ROSENBERG, Aaron J
Year of Publication 25.06.2020
Get full text
Year of Publication 25.06.2020
Patent
SCATTEROMETRY BASED METHODS AND SYSTEMS FOR MEASUREMENT OF STRAIN IN SEMICONDUCTOR STRUCTURES
ROSENBERG AARON J, TAN ZHENGQUAN, CHOUAIB HOUSSAM, LIN SHAWN KAI-HSIANG, HU DAWEI
Year of Publication 23.07.2021
Get full text
Year of Publication 23.07.2021
Patent