450mm Cu single damascene BEOL process with 20nm half-pitched features
Sunoo Kim, Dunn, Shannon, Smith, Steven, Collision, WenLi, Prudhomme, Jamie, Huey-Ming Wang, Maniscalco, Joe, Yathapu, Nithin, Chulgi Song, Wang, Barry, Carr, Christopher, Hsi-Wen Liu, Gall, Bruce, Alaestante, Angelo, Min-Hui Chen, Conti, Richard, ChungJu Yang, Sullivan, Denis, Culafi, Kosta, Moon, BumKi, Yii-Cheng Lin, Yu-Lieh Fu, Sieg, Katherine, Larrea, Anne-Sophie, Fish, Norman, Swaine, Regina, Bialy, Alexander, Tallon, Milo, Stapf, Gerard, Hagwood, John, Bryant, Michael, Cottle, Rand, Chang, Stock, Kelling, Mark, Schaefer, Karsten, Franca, Dan, Pinyen Lin, Borst, Christopher, Kwangwook Lee, JongHeun Lim, Skilbred, David, Chien, Cc, Robertson, Frank, Fria, Erin
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
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Conference Proceeding
Journal Article
Materials characterization and device analysis for evaluation of semiconductor processes by highly-sophisticated photoelastic stress measurement technique
Herms, Martin, Wagner, Matthias, Molchanov, Alexander, Lin, Pinyen, Wolf, Ingrid De, Zhao, Ming
Published in Physica status solidi. C (01.08.2015)
Published in Physica status solidi. C (01.08.2015)
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Journal Article
CONTACT STRUCTURES IN SEMICONDUCTOR DEVICES
WANG SUNG LI, HUANG JHIH RONG, CHU CHIA HUNG, TUNG YEN TIEN, SHEN TZER MIN, CHANG HSU KAI, LIANG SHUEN SHIN, LIN PINYEN
Year of Publication 15.02.2022
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Year of Publication 15.02.2022
Patent
CONTACT STRUCTURES IN SEMICONDUCTOR DEVICES
WANG SUNG LI, HUANG JHIH RONG, CHU CHIA HUNG, TUNG YEN TIEN, SHEN TZER MIN, CHANG HSU KAI, LIN PINYEN
Year of Publication 08.02.2022
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Year of Publication 08.02.2022
Patent
Self-association of hyaluronate segments in aqueous NaCl solution
Turner, Raymond E., Lin, Pinyen, Cowman, Mary K.
Published in Archives of biochemistry and biophysics (01.09.1988)
Published in Archives of biochemistry and biophysics (01.09.1988)
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Journal Article
Opportunities and challenges of the 450mm transition
Lin, John, Pinyen Lin, Wen-Yu Ku, Kelling, Mark C., Akiki, Greg, Sangdong Kwon, Kwangwook Lee, Collison, Wenli, Chang, Stock, Cottle, Rand, Yu-Chih Wang, Borst, Christopher, Skilbred, David, Robertson, Frank, Farrar, Paul
Published in 2013 IEEE International Electron Devices Meeting (01.12.2013)
Published in 2013 IEEE International Electron Devices Meeting (01.12.2013)
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Conference Proceeding
Journal Article
POLISHING PAD METHOD FOR MANUFACTURING POLISHING PAD AND POLISHING METHOD
LIU HSUAN PANG, HUANG CHI HAO, LIN PINYEN, CHIEN CHENG CHUNG, SIE YUAN CHUN
Year of Publication 08.06.2017
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Year of Publication 08.06.2017
Patent
Implantable Ultrasound Emitter Array for Medical Applications
Jingkuang Chen, Xiaoyang Cheng, Pinyen Lin, Shifang Zhou
Published in 19th IEEE International Conference on Micro Electro Mechanical Systems (2006)
Published in 19th IEEE International Conference on Micro Electro Mechanical Systems (2006)
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