Vertical and bevel-structured SiC etching techniques incorporating different gas mixture plasmas for various microelectronic applications
Sung, Ho-Kun, Qiang, Tian, Yao, Zhao, Li, Yang, Wu, Qun, Lee, Hee-Kwan, Park, Bum-Doo, Lim, Woong-Sun, Park, Kyung-Ho, Wang, Cong
Published in Scientific reports (20.06.2017)
Published in Scientific reports (20.06.2017)
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Journal Article
Atomic layer etching of graphene for full graphene device fabrication
Lim, Woong Sun, Kim, Yi Yeon, Kim, Hyeongkeun, Jang, Sukjae, Kwon, Namyong, Park, Beyoung Jae, Ahn, Jong-Hyun, Chung, Ilsub, Hong, Byung Hee, Yeom, Geun Young
Published in Carbon (New York) (01.02.2012)
Published in Carbon (New York) (01.02.2012)
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Journal Article
Atomic layer etching of ultra-thin HfO2 film for gate oxide in MOSFET devices
Park, Jae Beom, Lim, Woong Sun, Park, Byoung Jae, Park, Ih Ho, Kim, Young Woon, Yeom, Geun Young
Published in Journal of physics. D, Applied physics (07.03.2009)
Published in Journal of physics. D, Applied physics (07.03.2009)
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Journal Article
Atomic layer etching of (100)/(111) GaAs with chlorine and low angle forward reflected Ne neutral beam
Lim, Woong Sun, Park, Sang Duk, Park, Byoung Jae, Yeom, Geun Young
Published in Surface & coatings technology (30.08.2008)
Published in Surface & coatings technology (30.08.2008)
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Journal Article
Conference Proceeding
Ferrite-Enhanced U-Shaped Internal Antenna for Large-Area Inductively Coupled Plasma System
Kim, Kyong Nam, Lim, Jong Hyeuk, Lim, Woong Sun, Yeom, Geun Young
Published in IEEE transactions on plasma science (01.02.2010)
Published in IEEE transactions on plasma science (01.02.2010)
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Journal Article
CMOS-NEM CMOS-NEM-based associative memory augmentation neural network device and manufacturing method thereof
LIM WOONG SUN, KIM SANG SOO, CHO CHUYOUNG, SUJOUNG KANG, PARK HYEONG HO, PARK DEOKSOO, SUNGMIN PARK, CHOI YOUNGSU, LEE DONG KEUN, PARK KYUNGHO, HWANG SEON YONG, KIM CHANG HWAN, JUNG SANG HYUN, KIM JIN HYUN, KIM JAE MOO
Year of Publication 20.05.2024
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Year of Publication 20.05.2024
Patent
METHOD FOR PROCESS IMPLEMENTING NANO PATTERN METAL MESH USING Ag NANOWIRE AND HYBRID METAL MESH
SHIN, HYUN BEOM, SUNG, HO KUN, HEO, EUN JIN, KIM, SHIN KEUN, LIM, WOONG SUN
Year of Publication 29.06.2017
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Year of Publication 29.06.2017
Patent
SINGLE LAYER TOUCH SENSOR USING METAL MESH AND METHOD FOR MANUFACTURING THEM
LEE, BYUNG OU, LEE, KEUN WOO, SUNG, HO KUN, KIM, SHIN KEUN, LIM, WOONG SUN, LEE, HEE KWAN
Year of Publication 29.06.2017
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Year of Publication 29.06.2017
Patent
forming method of nanostructure pattern by vacuum deposition manufacturing method of sensor device and sensor device thereby
HWANG, SEON YONG, KOH, YU MIN, PARK, HYEONG HO, LEE, KEUN WOO, YOON, HONG MIN, SUNG, HO KUN, JUNG, SANG HYUN, PARK, KYUNG HO, CHO, CHU YOUNG, LIM, WOONG SUN, PARK, WON KYU
Year of Publication 06.02.2018
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Year of Publication 06.02.2018
Patent
Modified-bolometer array system and temperature measurement method using the same
SUNG, HO KUN, YOON, HONG MIN, KANG, HO KWAN, CHOI, JAE WON, LIM, WOONG SUN, PARK, MI LIM, PARK, BEOM DOO
Year of Publication 31.10.2016
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Year of Publication 31.10.2016
Patent
forming method of nanostructure pattern by vacuum deposition and sensor device thereby
HWANG, SEON YONG, KOH, YU MIN, PARK, HYEONG HO, LEE, KEUN WOO, YOON, HONG MIN, KANG, SEONG MIN, SUNG, HO KUN, JUNG, SANG HYUN, PARK, KYUNG HO, CHOI, JAE WON, LIM, WOONG SUN, PARK, WON KYU
Year of Publication 06.02.2018
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Year of Publication 06.02.2018
Patent
forming method of hybrid pattern by vacuum deposition manufacturing method of sensor device and sensor device thereby
HWANG, SEON YONG, KOH, YU MIN, JEONG, HAE YONG, JUNG, SANG HYUN, CHO, YOUNG DAE, CHO, CHU YOUNG, CHOI, WON MYOUNG, LIM, WOONG SUN, PARK, WON KYU, PARK, HYEONG HO, CHOI, YOUNG SU, LEE, KEUN WOO, YOON, HONG MIN, KANG, SEONG MIN, SUNG, HO KUN, PARK, KYUNG HO, CHOI, JAE WON
Year of Publication 06.02.2018
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Year of Publication 06.02.2018
Patent