STI 28nm pitch guided DSA to enable the 450mm tools qualification and transition
Larrea, Anne-Sophie, Dunn, Shannon, Collison, Wenli, Franca, Daniel, Borst, Christopher, Lee, Janghee, Lim, JongHeun J H, Chang, Stock
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
Published in 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2016)
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Conference Proceeding
Journal Article
450mm Cu single damascene BEOL process with 20nm half-pitched features
Sunoo Kim, Dunn, Shannon, Smith, Steven, Collision, WenLi, Prudhomme, Jamie, Huey-Ming Wang, Maniscalco, Joe, Yathapu, Nithin, Chulgi Song, Wang, Barry, Carr, Christopher, Hsi-Wen Liu, Gall, Bruce, Alaestante, Angelo, Min-Hui Chen, Conti, Richard, ChungJu Yang, Sullivan, Denis, Culafi, Kosta, Moon, BumKi, Yii-Cheng Lin, Yu-Lieh Fu, Sieg, Katherine, Larrea, Anne-Sophie, Fish, Norman, Swaine, Regina, Bialy, Alexander, Tallon, Milo, Stapf, Gerard, Hagwood, John, Bryant, Michael, Cottle, Rand, Chang, Stock, Kelling, Mark, Schaefer, Karsten, Franca, Dan, Pinyen Lin, Borst, Christopher, Kwangwook Lee, JongHeun Lim, Skilbred, David, Chien, Cc, Robertson, Frank, Fria, Erin
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
Published in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC) (01.05.2016)
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Conference Proceeding
Journal Article
Chemical Mechanical Planarization Technology for Si Wafer Bonding
Lim, JongHeun, Yoon, BoUn, Kim, KyungHyun, Ko, YoungSun, Kang, ChangJin
Published in ECS transactions (01.01.2010)
Published in ECS transactions (01.01.2010)
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Journal Article
INTEGRATED CIRCUIT DEVICE INCLUDING VERTICAL MEMORY DEVICE
Hwang, Changsun, Kwon, Youngjin, Seok, Hansol, Kim, Gihwan, Lim, Jongheun, Eun, Dongseog
Year of Publication 04.07.2024
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Year of Publication 04.07.2024
Patent
Integrated circuit device including vertical memory device
Hwang, Changsun, Kwon, Youngjin, Seok, Hansol, Kim, Gihwan, Lim, Jongheun, Eun, Dongseog
Year of Publication 16.04.2024
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Year of Publication 16.04.2024
Patent
INTEGRATED CIRCUIT DEVICES WITH HIGHLY INTEGRATED MEMORY AND PERIPHERAL CIRCUITS THEREIN
Jang, Kiseok, Hwang, Changsun, Seok, Hansol, Kim, Gihwan, Lim, Jongheun
Year of Publication 27.01.2022
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Year of Publication 27.01.2022
Patent
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
MIN, CHUNGKI, LIM, JONGHEUN, SEOK, HANSOL, KIM, GIHWAN, HWANG, CHANGSUN
Year of Publication 06.05.2021
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Year of Publication 06.05.2021
Patent
Three-dimensional semiconductor memory devices
Jang, Kiseok, Min, Chungki, Seo, Kieun, Hwang, Chang-Sun, Lim, Jongheun
Year of Publication 16.08.2022
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Year of Publication 16.08.2022
Patent
INTEGRATED CIRCUIT DEVICE INCLUDING VERTICAL MEMORY DEVICE
SEOK, Hansol, KIM, Gihwan, HWANG, Changsun, LIM, Jongheun, EUN, Dongseog, KWON, Youngjin
Year of Publication 02.12.2021
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Year of Publication 02.12.2021
Patent
THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES
JANG, Kiseok, SEO, Kieun, LIM, Jongheun, MIN, Chungki, HWANG, Chang-Sun
Year of Publication 27.05.2021
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Year of Publication 27.05.2021
Patent
Semiconductor memory device
Sohn, Yeon-Sil, Park, Kwangchul, Lim, JongHeun, Jung, Wonbong, Lee, Jin-I, Kim, Kyunghyun, Nam, Phil Ouk, Son, Yong-Hoon, Kim, Byeongju
Year of Publication 16.10.2018
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Year of Publication 16.10.2018
Patent
Chemical Mechanical Planarization Technology for Si Wafer Bonding
Lim, JongHeun, Yoon, BoUn, Kim, KyungHyun, Ko, YoungSun, Kang, ChangJin
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
Published in Meeting abstracts (Electrochemical Society) (08.07.2010)
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Journal Article
Investigation of the Slurry for Poly Si Stopping CMP Process
Pyon, Youngbeom, Seong, Choongkee, Lim, Jongheun, Bae, Kiho, Park, Kijong, Kim, Kyunghyun, Shin, Yugyun
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
Published in Meeting abstracts (Electrochemical Society) (04.06.2012)
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Journal Article
Semiconductor device and method of fabricating the same
Lee Jin-l, Sohn Yeon-Sil, Kim Kyunghyun, Son Yong-Hoon, Lim JongHeun, Kim Byeongju, Park Kwangchul, Jung Wonbong, Nam Phil Ouk
Year of Publication 25.07.2017
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Year of Publication 25.07.2017
Patent
SEMICONDUCTOR MEMORY DEVICE
KIM Byeongju, LIM JongHeun, NAM Phil Ouk, SON Yong-Hoon, LEE JIN-I, SOHN Yeon-Sil, PARK Kwangchul, KIM Kyunghyun, Jung Wonbong
Year of Publication 02.03.2017
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Year of Publication 02.03.2017
Patent
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
KIM Byeongju, LIM JongHeun, NAM Phil Ouk, JUNG Wonbong, SON Yong-Hoon, LEE Jin-I, SOHN Yeon-Sil, PARK Kwangchul, KIM Kyunghyun
Year of Publication 26.01.2017
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Year of Publication 26.01.2017
Patent