SEMICONDUCTOR DEVICE
LIM JAE SOON, PARK CHAN HOON, JEON IN TAK, SHIN DONG MIN, CHAE JI MIN, PARK YOUNG LIM
Year of Publication 14.07.2023
Get full text
Year of Publication 14.07.2023
Patent
ALUMINUM COMPOUND AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
LIM JAE-SOON, KOIDE YUKINOBU, CHO YOUN JOUNG, PARK GYU-HEE, MANABE YOSHIKI, KIMURA MASAYUKI, SAITO AKIO
Year of Publication 09.07.2020
Get full text
Year of Publication 09.07.2020
Patent
Niobium compound and method of forming thin film
AOKI YUTARO, LIM JAE SOON, CHO YOUN JOUNG, KOIDE TAKANORI, PARK GYU HEE, RYU SEUNG MIN, SAITO AKIO, FUSE WAKANA, LEE SO YOUNG
Year of Publication 17.02.2021
Get full text
Year of Publication 17.02.2021
Patent
COBALT PRECURSOR, METHOD FOR MANUFACTURING COBALT-CONTAINING LAYER USING THE SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
MIYAZAKI TAKAMASA, LIM JAE-SOON, SATO YOSUKE, NIHEI HIROSHI, SHIRAI MASASHI, CHO YOUN-JOUNG, KIM YOON-SOO, LEE SOYOUNG, SUGIMOTO KOHEI
Year of Publication 05.11.2020
Get full text
Year of Publication 05.11.2020
Patent
Method of forming thin film and method of manufacturing integrated circuit device
KIM, HYUN JUN, KIM, YOUN SOO, LEE, JIN SUN, PARK, GYU HEE, LIM, JAE SOON
Year of Publication 05.12.2018
Get full text
Year of Publication 05.12.2018
Patent
Lanthanum compound and methods of forming thin film and integrated circuit device
LIM JAE SOON, CHO YOUN JOUNG, YAMADA NAOKI, KIM YOUN SOO, HARANO KAZUKI, SATO HARUYOSHI, PARK GYU HEE, SHIRATORI TSUBASA
Year of Publication 25.09.2019
Get full text
Year of Publication 25.09.2019
Patent
TUNGSTEN PRECURSOR AND METHOD OF FORMING TUNGSTEN-CONTAINING LAYER USING THE SAME
AOKI YUTARO, LIM JAE-SOON, YUN JI EUN, SHIRATORI TSUBASA, SAITO AKIO, LEE SO YOUNG
Year of Publication 10.01.2019
Get full text
Year of Publication 10.01.2019
Patent
Tungsten precursor and Method of forming a tungsten-containing layer using the same
AOKI YUTARO, YUN, JI EUN, SHIRATORI TSUBASA, SAITO AKIO, LEE, SO YOUNG, LIM, JAE SOON
Year of Publication 27.12.2018
Get full text
Year of Publication 27.12.2018
Patent
Tantalum compound and methods of forming thin film and integrated circuit device
YAMADA NAOKI, KOIDE TAKANORI, SHIRATORI TSUBASA, RYU, SEUNG MIN, CHO, YOUN JOUNG, LIM, JAE SOON
Year of Publication 29.06.2017
Get full text
Year of Publication 29.06.2017
Patent
Method for fabricating semiconductor device and fabricating equipment for semiconductor device
CHO, GI HEE, LEE, HYUN SUK, CHO, YOUN JOUNG, LIM, JAE SOON, PARK, GYU HEE
Year of Publication 12.01.2018
Get full text
Year of Publication 12.01.2018
Patent