process evaluation method and method for controlling substrate fabrication apparatus
LIM, KYUNG CHUN, PARK, DONG SIK, SOHN, MIN KYU, LEE, SEUNG HO, JEONG, SU HO, SON, GIL SU, KIM, JUNG WOOK, LEE, MIN WOO
Year of Publication 29.11.2017
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Year of Publication 29.11.2017
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PLASMA PROCESSING APPARATUS
KIM, SU HONG, LEE, JU HYUN, LIM, KYUNG CHUN, LEE, JIN SEOK, LIM, YOUNG HO, SIN, CHUN CHOL, JEON, YUN KWANG, KIM, JUNG WOOK
Year of Publication 21.07.2011
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Year of Publication 21.07.2011
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Etching apparatus and method for semiconductor device
Sung, Doug Yong, Kwon, Tae-Yong, Han, Kyung Hyun, Lim, Kyung Chun, Jeong, Sang Min
Year of Publication 22.11.2011
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Year of Publication 22.11.2011
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Etching apparatus and method for semiconductor device
LIM KYUNG CHUN, HAN KYUNG HYUN, KWON TAE-YONG, SUNG DOUG YONG, JEONG SANG MIN
Year of Publication 22.11.2011
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Year of Publication 22.11.2011
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ETCHING APPARATUS AND ETCHING METHOD FOR SEMICONDUCTOR ELEMENT
LIM KYUNG CHUN, HAN KYUNG HYUN, KWON TAE YONG, SUNG DONG YONG, JEONG SANG MIN
Year of Publication 23.10.2008
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Year of Publication 23.10.2008
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Etching apparatus and method for semiconductor device
LIM KYUNG CHUN, HAN KYUNG HYUN, KWON TAE-YONG, SUNG DONG YONG, JEONG SANG MIN
Year of Publication 09.10.2008
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Year of Publication 09.10.2008
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ETCHING METHOD FOR SEMICONDUCTOR DEVICE
JEONG, SANG MIN, LIM, KYUNG CHUN, HAN, KYUNG HYUN, SUNG, DOUG YONG, KWON, TAE YONG
Year of Publication 08.10.2008
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Year of Publication 08.10.2008
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