Search Results - "LIM, CHANG MOON" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

EUV MASK AND PHOTO MASK MANUFACTURED BY USING THE EUV MASK

EUV MASK AND PHOTO MASK MANUFACTURED BY USING THE EUV MASK

by PARK CHAN HA, LEE SANG HO, PARK SUK WON, JEE TAE KWON, LIM CHANG MOON
Year of Publication 13.09.2022

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Patent

Method for forming fine patterns

Method for forming fine patterns

by LIM, CHANG MOON, LEE, BYOUNG HOON
Year of Publication 17.03.2017

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Patent

Analysis of Horizontal-Vertical Patterning Asymmetry in a Linearly Polarized Deep UV Exposure System

Analysis of Horizontal-Vertical Patterning Asymmetry in a Linearly Polarized Deep UV Exposure System

by Lim, Chang-Moon, Hyeong-Soo Kim, Hyeong-Soo Kim, Ki-Ho Baik, Ki-Ho Baik
Published in Japanese Journal of Applied Physics (01.01.1998)

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Journal Article

METHOD OF FABRICATING AIR GAP BETWEEN INTERCONNECTIONS AND STRUCTURE THEREBY

METHOD OF FABRICATING AIR GAP BETWEEN INTERCONNECTIONS AND STRUCTURE THEREBY

by LIM, CHANG MOON, LEE, BYOUNG HOON
Year of Publication 10.06.2015

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Patent

METHOD FOR FORMING SEMICONDUCTOR DEVICE

METHOD FOR FORMING SEMICONDUCTOR DEVICE

by LIM, CHANG MOON, LEE, BYOUNG HOON
Year of Publication 05.02.2014

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Patent

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

by LIM, CHANG MOON, LEE, BYOUNG HOON
Year of Publication 26.06.2013

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Patent

EXTREME ULTRA VIOLET MASK AND METHOD OF MANUFACTURING THE SAME

EXTREME ULTRA VIOLET MASK AND METHOD OF MANUFACTURING THE SAME

by LIM, CHANG MOON, PARK, JUN TAEK
Year of Publication 21.12.2011

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Patent

EXTREME ULTRA VIOLET MASK AND METHOD OF MANUFACTURING THE SAME

EXTREME ULTRA VIOLET MASK AND METHOD OF MANUFACTURING THE SAME

by LIM, CHANG MOON, PARK, JUN TAEK
Year of Publication 21.12.2011

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Patent

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

by LIM, CHANG MOON, LEE, BYOUNG HOON
Year of Publication 16.09.2011

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Patent

SEMICONDUCTOR DEVICE WITH BURIED BITLINE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE WITH BURIED BITLINE AND METHOD FOR MANUFACTURING THE SAME

by KOO, SUN YOUNG, LIM, CHANG MOON
Year of Publication 07.07.2011

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Patent

EUV LITHOGRAPHY METHOD FOR SUPPRESSING BLACK BORDER EFFECT

EUV LITHOGRAPHY METHOD FOR SUPPRESSING BLACK BORDER EFFECT

by LIM, CHANG MOON, PARK, JUN TAEK, KIM, SEOK KYUN
Year of Publication 21.08.2013

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Patent

OVERLAY VERNIER AND METHOD FOR FORMING THE SAME

OVERLAY VERNIER AND METHOD FOR FORMING THE SAME

by KOO, SUN YOUNG, LIM, CHANG MOON
Year of Publication 06.01.2011

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Patent

MANUFACTURING METHOD OF LITHOGRAPHY MASK FOR FORMING AND REPRODUCING ORIGINAL MASK BY PERFORMING EXPOSURE PROCESS

MANUFACTURING METHOD OF LITHOGRAPHY MASK FOR FORMING AND REPRODUCING ORIGINAL MASK BY PERFORMING EXPOSURE PROCESS

by LIM, CHANG MOON
Year of Publication 05.02.2005

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Patent

REFLECTIVE MASK AND FABRICATION METHOD FOR THE SAME

REFLECTIVE MASK AND FABRICATION METHOD FOR THE SAME

by KOO, SUN YOUNG, LIM, CHANG MOON, HYUN, YOON SUK, LEE, BYOUNG HOON, KIM, YONG DAE, HA, TAE JOONG, KIM, JIN SOO, LIM, MI JEONG, KIM, SEO MIN, LEE, IN HWAN
Year of Publication 26.07.2016

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Patent

METHOD FOR MEASURING QUANTITATIVELY EFFECT OF ADDITIVE ADDED IN CHEMICALLY AMPLIFIED RESIST

METHOD FOR MEASURING QUANTITATIVELY EFFECT OF ADDITIVE ADDED IN CHEMICALLY AMPLIFIED RESIST

by LIM, CHANG MOON
Year of Publication 06.04.2000

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Patent

SEMICONDUCTOR APPARATUS

SEMICONDUCTOR APPARATUS

by LIM, CHANG-MOON
Year of Publication 20.03.1999

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Patent

PHOTOMASK, METHOD OF FORMING PATTERN OF SEMICONDUCTOR DEVICE USING THE SAME AND METHOD OF MEASURING OVERLAY OF PATTERN

PHOTOMASK, METHOD OF FORMING PATTERN OF SEMICONDUCTOR DEVICE USING THE SAME AND METHOD OF MEASURING OVERLAY OF PATTERN

by LIM, CHANG MOON, LEE, BYOUNG HOON, PARK, JUN TAEK, KIM, MYOUNG SOO, PARK, JEONG SU, LEE, IN HWAN
Year of Publication 10.03.2014

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Patent

SEMICONDUCTOR DEVICE WITH BURIED BITLIN METHOD FOR MANUFACTURING THE SAMEE

SEMICONDUCTOR DEVICE WITH BURIED BITLIN METHOD FOR MANUFACTURING THE SAMEE

by LIM, CHANG MOON, KIM, HYEONG SOO, MA, WON KWANG
Year of Publication 08.06.2011

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Patent

METHOD OF FABRICATING CYLINDRICAL CAPACITOR OF SEMICONDUCTOR DEVICE USING CONDUCTIVE ANTI-REFLECTIVE COATING FILM

METHOD OF FABRICATING CYLINDRICAL CAPACITOR OF SEMICONDUCTOR DEVICE USING CONDUCTIVE ANTI-REFLECTIVE COATING FILM

by LIM, CHANG MOON, JUNG, JIN HEE
Year of Publication 15.01.2000

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Patent

FINE PATTERNING METHOD OF SEMICONDUCTOR DEVICE

FINE PATTERNING METHOD OF SEMICONDUCTOR DEVICE

by LIM, CHANG-MOON, BAEK, KI-HO, KIM, HYUNG-SOO
Year of Publication 01.02.1999

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Patent

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