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Year of Publication 04.08.2021
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System and methods of generating comparable regions of a lithographic mask
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Year of Publication 01.03.2022
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SYSTEM AND METHODS OF GENERATING COMPARABLE REGIONS OF A LITHOGRAPHIC MASK
Dassa, Oded O, Lifschitz, Sivan, Cohen, Boaz, Attal, Shay, Greenberg, Gadi, Parizat, Ziv
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Year of Publication 29.07.2021
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System and methods of generating comparable regions of a lithographic mask
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Year of Publication 01.12.2021
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SYSTEM AND METHODS OF GENERATING COMPARABLE REGIONS OF A LITHOGRAPHIC MASK
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Year of Publication 13.08.2021
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