100 kHz MEMS Vibratory Gyroscope
Liewald, Jan-Timo, Kuhlmann, Burkhard, Balslink, Thorsten, Trachtler, Martin, Dienger, Matthias, Manoli, Yiannos
Published in Journal of microelectromechanical systems (01.10.2013)
Published in Journal of microelectromechanical systems (01.10.2013)
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Journal Article
미세 기계식 회전비 센서 배열체, 회전비 센서 어레이 및 상응하는 제조 방법
PRUETZ ODD AXEL, KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, DEGENFELD SCHONBURG PETER, BODE NIELS, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 21.10.2022
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Year of Publication 21.10.2022
Patent
주 연장 평면을 갖는 기판을 포함한 요레이트 센서, 그리고 요레이트 센서를 위한 제조 방법
KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, DEGENFELD SCHONBURG PETER, BODE NIELS, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 06.07.2020
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Year of Publication 06.07.2020
Patent
선형 및 회전 구동형 센서 장치들을 구비한 3축 마이크로기계식 요레이트 센서 어셈블리
PRUETZ ODD AXEL, KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, DEGENFELD SCHONBURG PETER, BODE NIELS, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 08.05.2020
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Year of Publication 08.05.2020
Patent
요 레이트 센서, 요 레이트 센서를 제조하기 위한 방법
PRUETZ ODD AXEL, KUHLMANN NILS FELIX, LASSL ANDREAS, KUEHNEL MATTHIAS, NEUL REINHARD, BODE NIELS, DEGENFELD SCHONBURG PETER, KUHLMANN BURKHARD, LIEWALD JAN TIMO
Year of Publication 03.04.2020
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Year of Publication 03.04.2020
Patent
METHOD FOR ADJUSTING AN INERTIAL SENSOR COMPONENT BY MEANS OF A CALIBRATION DEVICE, CALIBRATION DEVICE, BASE DEVICE AND INERTIAL SENSOR COMPONENT
Meier, Matthias, Hertle, Tobias, Struchholz, Michael, Liewald, Jan-Timo, Proebster, Magnus Christian, Mennicke, Carsten, Hoefer, Holger
Year of Publication 23.05.2024
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Year of Publication 23.05.2024
Patent
Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method
Liewald, Jan-Timo, Neul, Reinhard, Kuhlmann, Burkhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 09.04.2024
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Year of Publication 09.04.2024
Patent
Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor
Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Degenfeld-Schonburg, Peter
Year of Publication 23.08.2022
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Year of Publication 23.08.2022
Patent
CAPTEUR DE VITESSE DE ROTATION COMPORTANT UN SUBSTRAT AVEC UN PLAN PRINCIPAL D'EXTENSION AINSI QU'UN PROCEDE DE FABRICATION D'UN CAPTEUR DE VITESSE DE ROTATION
DEGENFELD-SCHONBURG, PETER, KUHLMANN, NILS FELIX, KUEHBEL, MATTHIAS, NEUL, REINHARD, KUHLMANN, BURKHARD, LASSL, ANDREAS, BODE, NIELS, LIEWALD, JAN-TIMO
Year of Publication 05.08.2022
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Year of Publication 05.08.2022
Patent
MICROMECHANICAL RATE-OF-ROTATION SENSOR SET-UP, RATE-OF-ROTATION SENSOR ARRAY AND CORRESPONDING MANUFACTURING METHOD
Liewald, Jan-Timo, Neul, Reinhard, Kuhlmann, Burkhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 09.02.2023
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Year of Publication 09.02.2023
Patent
THREE AXIS MICROMECHANICAL ROTATIONAL RATE SENSOR ARRANGEMENT WITH LINEARLY AND ROTATIONALLY DRIVABLE SENSOR DEVICES
NEUL, Reinhard, KUHLMANN, Burkhard, BODE, Niels, KUEHNEL, Matthias, LASSL, Andreas, PRUETZ, Odd-Axel, KUHLMANN, Nils Felix, DEGENFELD-SCHONBURG, Peter, LIEWALD, Jan-Timo
Year of Publication 01.06.2022
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Year of Publication 01.06.2022
Patent
YAW-RATE SENSOR WITH A SUBSTRATE HAVING A MAIN EXTENSION PLANE, METHOD FOR MANUFACTURING A YAW-RATE SENSOR
Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Degenfeld-Schonburg, Peter
Year of Publication 10.06.2021
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Year of Publication 10.06.2021
Patent
Three-axis micromechanical rotation rate sensor system including linearly and rotatorily drivable sensor units
Lassi, Andreas, Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 18.01.2022
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Year of Publication 18.01.2022
Patent
Verfahren zum Abgleich eines Inertialsensorbauteils mittels einer Kalibriereinrichtung, Kalibriereinrichtung, Sockeleinrichtung und Inertialsensorbauteil
Meier, Matthias, Hertle, Tobias, Liewald, Jan-Timo, Struchholz, Michael, Proebster, Magnus Christian, Mennicke, Carsten, Hoefer, Holger
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
Patent
Micromechanical rotational rate sensor system and corresponding production method
Lassi, Andreas, Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter
Year of Publication 26.01.2021
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Year of Publication 26.01.2021
Patent