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Published in Journal of ethnopharmacology (10.08.2023)
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Micro-Fabrication of Single Crystal Silicon by Using Combination Technique of Nano-scale Machining and Alkaline Etching (2nd Report): Dependence of Masking Effect on Machining Conditions and Application to 3 Dimensional Microstructure
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Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.12.2004)
Published in Journal of the Japan Society for Precision Engineering, Contributed Papers (05.12.2004)
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