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Year of Publication 15.12.2020
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Method and system for controlling plasma in semiconductor fabrication
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Year of Publication 27.08.2019
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Year of Publication 27.08.2019
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METHOD FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
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Year of Publication 12.12.2019
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COATING APPARATUS AND METHOD OF FORMING COATING FILM
LIN Mao-Cheng, LIAO Si-Wen, LIU Ding-I, LEU Po-Hsiung, YANG Yong-Hung, WANG Lan-Hai
Year of Publication 08.06.2017
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Coating apparatus and method of forming coating film
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Year of Publication 21.02.2017
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Year of Publication 21.02.2017
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Thermal chemical vapor deposition system and operating method thereof
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Year of Publication 25.12.2018
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METHOD AND SYSTEM FOR CONTROLLING PLASMA IN SEMICONDUCTOR FABRICATION
WU Cheng-Tsung, LIAO Si-Wen, LIU Ding-I, LEU Po-Hsiung, KUNG Hsiang-Sheng
Year of Publication 24.11.2016
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Year of Publication 24.11.2016
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Thermal Chemical Vapor Deposition System and Operating Method Thereof
Hsieh, Jheng-Uei, Lo, Yen-Chan, Liao, Si-Wen, Lai, Yi-Fang, Hsu, Kai-Shiung, Lin, Shian-Huei, Liu, Ding-I, Hsu, Jui-Fu, Leu, Po-Hsiung, Wu, Cheng-Tsung
Year of Publication 22.11.2018
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Year of Publication 22.11.2018
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Apparatus and operation method thereof
Liao Si-Wen, Xu Jia-Wei, Lo Fu-Shun, Wu Chien-Cheng, Lin Mao-Cheng, Liu Ding-I, Wang Lan-Hai
Year of Publication 28.03.2017
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Year of Publication 28.03.2017
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THERMAL CHEMICAL VAPOR DEPOSITION SYSTEM AND OPERATING METHOD THEREOF
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Year of Publication 20.04.2017
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Year of Publication 20.04.2017
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Verfahren und System zum Steuern von Plasma in einer Halbleiterfertigung
Liao, Si-Wen, Liu, Ding-I, Leu, Po-Hsiung, Kung, Hsiang-Sheng, Wu, Cheng-Tsung
Year of Publication 29.03.2018
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Year of Publication 29.03.2018
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Verfahren und System zum Steuern von Plasma in einer Halbleiterfertigung
Liao, Si-Wen, Liu, Ding-I, Leu, Po-Hsiung, Kung, Hsiang-Sheng, Wu, Cheng-Tsung
Year of Publication 24.11.2016
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Year of Publication 24.11.2016
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Thin film deposition apparatus with multi chamber design and film deposition methods
LIU DING-I, LEU PO-HSIUNG, LIAO SI-WEN, WANG LAN HAI, YANG YONG-HUNG, TAI CHIA-MING
Year of Publication 26.04.2016
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Year of Publication 26.04.2016
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COATING APPARATUS AND METHOD OF FORMING COATING FILM
LIU DING-I, LIN MAONG, WANG LAN-HAI, LEU PO-HSIUNG, LIAO SI-WEN, YANG YONG-HUNG
Year of Publication 03.12.2015
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Year of Publication 03.12.2015
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