Ice processes and surface ablation in a shallow thermokarst lake in the central Qinghai–Tibetan Plateau
Huang, Wenfeng, Li, Runling, Han, Hongwei, Niu, Fujun, Wu, Qingbai, Wang, Wenke
Published in Annals of glaciology (01.03.2016)
Published in Annals of glaciology (01.03.2016)
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Journal Article
Application of e-Beam Voltage Contrast Technique for Overlay Improvement and Process Window Control in Multi-Patterning Interconnect Scheme
Yang, Linrong, Li, Runling, Hsu, Ikai, Zhang, Haiqiong, Ren, Jiadong, Zhou, Wenzhan, Sun, Linlin, Xue, Yawen, Yang, Wenchao, Zhang, Ruilin, Zhu, Yefang, Zhang, Yan, Zhang, Guifeng, Fu, Yingying, Yin, Shan, Jia, Yujie, Yu, Bo, Brozek, Tomasz
Published in IEEE journal of the Electron Devices Society (2022)
Published in IEEE journal of the Electron Devices Society (2022)
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Journal Article
Challenges and solutions for 14nm FinFET etching
Huang Jun, Li Quanbo, Chong Ermin, Yi Chunyan, Li Runling, Gai Chenguang, Ma Zhibiao, Yu Zhang, Pang, Albert
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
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Conference Proceeding
Journal Article
Methods of line end cutting of small CD for 28nm technology
Li, Quanbo, Meng, Xiangguo, Tian, Jun, Huang, Jun, Liu, Biqiu, Li, Zhonghua, Li, Runling, Zhang, Yu
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
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Conference Proceeding
Journal Article
The study of Shallow Trench Isolation gap-fill for 28nm node and beyond
Bao, Yu, Zhou, Xiaoqiang, Sang, Ningbo, Lei, Tong, Shi, Gang, Yi, Hailan, Zhong, Bin, Zhou, Jun, Li, Fang, Ding, Yi, Li, Runling, Zhou, Haifeng, Fang, Jingxun
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
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Conference Proceeding
Journal Article
Photolithography solutions for fabrication of Fin and Poly-gate in 14nm FinFET devices
Guo, Xiaobo, Dong, Xianguo, Yao, Shuxin, Gan, Zhifeng, Wang, Wuping, Yang, Zhengkai, Chong, Ermin, Li, Quanbo, Mao, Zhibiao, Zhang, Liang, Li, Runling, Zhang, Yu
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
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Conference Proceeding
Journal Article
The study of 28nm node poly double patterning integrated process
Zhonghua Li, Runling Li, Tianpeng Guan, Biqiu Liu, Xiaoming Mao, Xiangguo Meng, Quanbo Li, Fang Li, Zhengkai Yang, Yu Zhang, Pang, Albert
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
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Journal Article
Method of improving enhance alignment quality in Double Patterning with Spacer process for 14-16nm FinFET
Xianguo Dong, Zhibiao Mao, Zhengkai Yang, Zhifeng Gan, Wuping Wang, Xiaobo Guo, Liang Zhang, Yang Wang, Ermin Chong, Runling Li, Yu Zhang, Pang, Albert
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)
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Conference Proceeding
Journal Article
Fault Diagnosis of Broken Bars in Induction Motors Using EMD
Li, Xiao Quan, Li, Run Ling, Wang, Jing Chen
Published in Applied Mechanics and Materials (01.08.2013)
Published in Applied Mechanics and Materials (01.08.2013)
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Journal Article
Frame Synchronization Algorithm Based on Adaptive Dual- Threshold Decision
Shang, Yaobo, Li, Runling, Zhang, Jiaqiang, Zhang, Dongwei, Li, Zhe
Published in 2022 IEEE 4th International Conference on Civil Aviation Safety and Information Technology (ICCASIT) (12.10.2022)
Published in 2022 IEEE 4th International Conference on Civil Aviation Safety and Information Technology (ICCASIT) (12.10.2022)
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Conference Proceeding
Mark Damage Phenomenon Caused by Superimposed CMP Dishing on Large-Area STI Regions
WenSheng, Xu, You, Ba, YongBo, Chen, YuJie, Zhu, RunLing, Li, ShiJin, Ding, JiongHan, Ye
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
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Conference Proceeding