METHOD FOR FABRICATING DEVICES USING CHEMICAL VAPOUR DEPOSITION, AND DEVICES FORMED THEREBY
GALLAGHER, PATRICK, KENT, LEVY, ROLAND, ALBERT, GREEN, MARTIN, LAURENCE
Year of Publication 01.06.1988
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Year of Publication 01.06.1988
Patent
METHOD FOR FABRICATING DEVICES USING CHEMICAL VAPOUR DEPOSITION, AND DEVICES FORMED THEREBY
GALLAGHER, PATRICK, KENT, LEVY, ROLAND, ALBERT, GREEN, MARTIN, LAURENCE
Year of Publication 17.12.1987
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Year of Publication 17.12.1987
Patent