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Year of Publication 26.09.2001
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Year of Publication 26.09.2001
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Lithographic apparatus, position quantity detection system and method
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Year of Publication 09.11.2006
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Year of Publication 09.11.2006
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Abbe arm calibration system for use in lithographic apparatus
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Year of Publication 23.09.2004
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Year of Publication 23.09.2004
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Abbe arm calibration system for use in lithographic apparatus
STRAAIJER ALEXANDER, LOOPSTRA ERIK R, LEVASIER LEON M, BURGHOOM JACOBUS, GROENEVELD ROGIER H. M
Year of Publication 04.05.2004
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Year of Publication 04.05.2004
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Abbe arm calibration system for use in lithographic apparatus
Groeneveld, Rogier H. M, Loopstra, Erik R, Burghoom, Jacobus, Levasier, Leon M, Straaijer, Alexander
Year of Publication 04.05.2004
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Year of Publication 04.05.2004
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Lithographic apparatus, method of calibration, calibration plate, device manufacturing method, and device manufactured thereby
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Year of Publication 30.06.2005
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Year of Publication 30.06.2005
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SYSTEM AND METHOD FOR MONITORING AND DIAGNOSING SYSTEM STATUS AND PERFORMANCE
REUHMAN-HUISKEN MARIA E, SCHOEMAKER ERIK J, BOOTSMA TIMOTHEUS MARC VINCENT, VAN RHEE TASJA, JACQMIN ERIC, SALPIETRO ROSARIA, VAN KERVINCK MARCEL NICOLAAS J, LEVASIER LEON M, PRINS MARTIN
Year of Publication 25.01.2007
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Year of Publication 25.01.2007
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System and method of monitoring and diagnosing system condition and performance
REUHMAN-HUISKEN MARIA E, SCHOEMAKER ERIK J, VAN RHEE TASJA, JACQMIN ERIC, BOOTSMA TIMOTHEUS M.V, SALPIETRO ROSARIA, VAN KERVINCK MARCEL NICOLAAS J, LEVASIER LEON M, PRINS MARTIN
Year of Publication 04.01.2007
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Year of Publication 04.01.2007
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SUBSTRATE TABLE FOR REDUCING OVERLAY OR USAGE OS SURFACE FLATNESS INFORMATION OF MASK TABLE
OTTENS JOOST JEROEN, VAN EMPEL TJARKO ADRIAAN RUDOLF, ZAAL KOEN JACOBUS JOHANNES MARIA, BRINKHOF RALPH, LEVASIER LEON M, SALDEN KOENRAAD STEPHAN S, OESTERHOLT RENE
Year of Publication 15.06.2006
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Year of Publication 15.06.2006
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ABBE ARM CORRECTION SYSTEM USED IN LITHOGRAPHY SYSTEM
STRAAIJER ALEXANDER, GROENEVELD ROGIER H M, LOOPSTRA ERIK R, LEVASIER LEON M, BURGHOORM JACOBUS
Year of Publication 07.09.2001
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Year of Publication 07.09.2001
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Abbe arm calibration system for use in lithographic apparatus
STRAAIJER ALEXANDER, LOOPSTRA ERIK R, LEVASIER LEON M, GROENEVELD ROGIER H.M, BURGHOOM JACOBUS
Year of Publication 19.07.2001
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Year of Publication 19.07.2001
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Lithographic apparatus and method for manufacturing a device
BECKERS MARCEL, JOHANNES VAN ASTEN NICOLAAS A.A, VAN EMPEL TJARKO A.R, LOOPSTRA ERIK R, VAN DEN SCHOOR LEON J.M, VAN LOENHOUT ELKE, LEVASIER LEON M, SENGERS TIMOTHEUS F, BOX WILHELMUS J, OUWEHAND LUBERTHUS, HUBERTUS MUITJENS MARCEL J.E, JANSEN ROB
Year of Publication 21.06.2007
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Year of Publication 21.06.2007
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LITHOGRAPHY SYSTEM WITH ALIGNMENT SUBSYSTEM, FABRICATION PROCESS OF DEVICE USING ALIGNMENT, AND ALIGNMENT STRUCTURE
JEUNINK ANDRE BERNARDUS, DEN BOEF ARIE JEFFREY, DIRNSTORFER INGO, LEVASIER LEON M, TOLSMA HOITE PIETER THEODOOR, SETIJA IRWAN DANI, KRUIJSWIJK STEFAN G, PELLEMANS HENRICUS PETRUS MARIA
Year of Publication 11.08.2005
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Year of Publication 11.08.2005
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