(Invited) Supercritical Drying: A Sustainable Solution to Pattern Collapse of High-Aspect-Ratio and Low-Mechanical-Strength Device Structures
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Published in Meeting abstracts (Electrochemical Society) (07.07.2015)
Published in Meeting abstracts (Electrochemical Society) (07.07.2015)
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Year of Publication 27.05.2021
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Year of Publication 20.06.2019
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Seam healing using high pressure anneal
Wu, Yong, Leschkies, Kurtis, Chen, Yihong, Manna, Pramit, Mallick, Abhijit Basu, Jiang, Shishi, Cheng, Rui, Gandikota, Srinivas
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Year of Publication 28.04.2020
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Dry stripping of boron carbide hardmask
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Year of Publication 11.05.2022
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METHOD OF GROWING THICK OXIDE FILMS AT LOW TEMPERATURE OF THERMAL OXIDE QUALITY
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Year of Publication 26.10.2021
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Year of Publication 26.10.2021
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Package core assembly and fabrication methods
PARK, GI-BACK, LESCHKIES, KURTIS, BUCH, CHINTAN, CHEN, HAN-WEN, GOUK, ROMAN, DICAPRIO, VINCENT, VERHAVERBEKE, STEVEN, CHO, KYUIL
Year of Publication 01.06.2024
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Year of Publication 01.06.2024
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SEAM HEALING USING HIGH PRESSURE ANNEAL
CHEN, Yihong, MANNA, Pramit, WU, Yong, CHENG, Rui, MALLICK, Abhijit Basu, JIANG, Shishi, LESCHKIES, Kurtis, GANDIKOTA, Srinivas
Year of Publication 01.08.2019
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Year of Publication 01.08.2019
Patent
SEAM HEALING USING HIGH PRESSURE ANNEAL
Wu, Yong, Leschkies, Kurtis, Chen, Yihong, Manna, Pramit, Mallick, Abhijit Basu, Jiang, Shishi, Cheng, Rui, Gandikota, Srinivas
Year of Publication 25.07.2019
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Year of Publication 25.07.2019
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Package core assembly and fabrication methods
LESCHKIES, KURTIS, BUCH, CHINTAN, CHEN, HAN-WEN, GOUK, ROMAN, DICAPRIO, VINCENT, VERHAVERBEKE, STEVEN, CHO, KYUIL, PARK, GIBACK
Year of Publication 01.03.2024
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Year of Publication 01.03.2024
Patent