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Year of Publication 08.01.2009
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ROTATION RATE SENSOR
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Year of Publication 08.01.2009
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Year of Publication 08.01.2009
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Rotation rate sensor
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Year of Publication 31.03.2010
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Year of Publication 31.03.2010
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ROTATION RATE SENSOR
SPAHLINGER, GUENTER, LEINFELDER, PETER, BARTHOLOMEYCZIK, JULIAN, GEIGER, WOLFRAM
Year of Publication 08.01.2009
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Year of Publication 08.01.2009
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Drehratensensor
SPAHLINGER, GUENTER, LEINFELDER, PETER, BARTHOLOMEYCZIK, JULIAN, GEIGER, WOLFRAM
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Year of Publication 02.01.2009
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Micromechanical accelerometer with plate-like semiconductor wafers
LEINFELDER; PETER, VETTER; EGBERT, HAFEN; MARTIN, RYRKO; BRUNO, HANDRICH; EBERHARD, GESSNER; THOMAS, WIEMER; MAIK
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Year of Publication 25.03.1997
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Micromechanical accelerometer and method of manufacture thereof
LEINFELDER; PETER, VETTER; EGBERT, HAFEN; MARTIN, RYRKO; BRUNO, HANDRICH; EBERHARD, GESSNER; THOMAS, WIEMER; MAIK
Year of Publication 02.04.1996
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Year of Publication 02.04.1996
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