POWDER FEEDING APPARATUS AND SUBSTRATE DEPOSITING APPARATUS HAVING THE SAME
LEE, HYUNG SUP, HAN, GEUN JO, LEE, KYOO HWAN, LEE, CHANG JAE, KWON, YOUNG HO, JEON, CHANG YEOP
Year of Publication 28.12.2011
Get full text
Year of Publication 28.12.2011
Patent
Gas injector and film deposition apparatus having the same
NAM GOONG SUNG TAE, LEE CHANG JAE, KWON YOUNG HO, LEE KYOO HWAN, LEE HYUNG SUP
Year of Publication 14.01.2014
Get full text
Year of Publication 14.01.2014
Patent