New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60 nm and below DRAMs
HO JIN CHO, YOUNG DAE KIM, YONG WOOK SONG, DONG SU PARK, LEE, Euna, CHEOL HWAN PARK, JUN SOO JANG, KEUM BUM LEE, HAI WON KIM, YOUNG JONG KI, HAN, Keun
Published in Solid-state electronics (01.11.2007)
Published in Solid-state electronics (01.11.2007)
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Conference Proceeding
New TIT Capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs
Ho Jin Cho, Young Dae Kim, Dong Su Park, Euna Lee, Cheol Hwan Park, Jun Soo Jang, Keum Bum Lee, Hai Won Kim, Soo Jin Chae, Young Jong Ki, Il Keun Han, Yong Wook Song
Published in 2006 European Solid-State Device Research Conference (01.09.2006)
Published in 2006 European Solid-State Device Research Conference (01.09.2006)
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Conference Proceeding
ACCESS DEVICE AND FABRICATION METHOD THEREOF, AND SEMICONDUCTOR MEMORY DEVICE HAVING THE SAME
LEE, KEUM BUM, LEE, YOUNG HO, LEE, HYUNG SUK, BAEK, SEUNG BEOM, LEE, MIN YONG
Year of Publication 05.03.2014
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Year of Publication 05.03.2014
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