METHOD OF MANUFACTURING SILICON DOPED METAL OXIDE LAYER USING ATOMIC LAYER DEPOSITION TECHNIQUE
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Year of Publication 18.07.2006
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Year of Publication 18.07.2006
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FABRICATING METHOD FOR SEMICONDUCTOR DEVICE
KIM, JIN HYUN, UM, MYUNG YOON, CHU, KANG SOO, LEE, JUNG HYOUNG, NAM, MYUNG HEE, YOUN, KWAN YOUNG
Year of Publication 22.06.2006
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Year of Publication 22.06.2006
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Substrate for organic electronic device
LEE, JUNG-HYOUNG, JEONG, HYE-WON, SHIN, BO-RA, PARK, HANG-AH, LEE, SANG-JUN, IM, MI-RA, KIM, JI-HEE
Year of Publication 16.07.2015
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Year of Publication 16.07.2015
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HCI and BTI characteristics of ALD HfSiO(N) gate dielectrics as the compositions and the post treatment conditions
JONG PYO KIM, KIM, Yun-Seok, KANG, Ho-Kyu, SUH, Kwang-Pyuk, CHUNG, Young-Su, HA JIN LIM, JUNG HYOUNG LEE, SEOK JOO DOH, JUNG, Hyung-Suk, HAN, Sung-Kee, KIM, Min-Joo, LEE, Jong-Ho, LEE, Nae-In
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
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Conference Proceeding
Poly-Si gate CMOSFETs with HfO2-Al2O3 laminate gate dielectric for low power applications
LEE, Jong-Ho, KIM, Yun-Seok, SUH, Kwang-Pyuk, JUNG, Hyung-Seok, LEE, Jung-Hyoung, LEE, Nae-In, KANG, Ho-Kyu, KU, Ja-Hum, HEE SUNG KANG, KIM, Youn-Keun, CHO, Kyung-Hwan
Year of Publication 2002
Year of Publication 2002
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Improved current performance of CMOSFETs with nitrogen incorporated HfO2-Al2O3 laminate gate dielectric
Hyung-Seok Jung, Yun-Seok Kim, Jong Pyo Kim, Jung Hyoung Lee, Jong-Ho Lee, Nae-In Lee, Ho-Kyu Kang, Kwang-Pyuk Suh, Hyuk Ju Ryu, Chang-Bong Oh, Young-Wug Kim, Kyung-Hwan Cho, Hion-Suck Baik, Young Su Chung, Hyo Sik Chang, Dae Won Moon
Published in Digest. International Electron Devices Meeting (2002)
Published in Digest. International Electron Devices Meeting (2002)
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Conference Proceeding
Characteristics of ALD HfSiO/sub x/ using new Si precursors for gate dielectric applications
Yun-Seok Kim, Ha Jin Lim, Hyung-Suk Jung, Jong-Ho Lee, Jae-Eun Park, Sung Kee Han, Jung Hyoung Lee, Seok-Joo Doh, Jong Pyo Kim, Nae In Lee, Ho-Kyu Kang, Youngsu Chung, Hae Young Kim, Nam Kyu Lee, Ramanathan, S., Seidel, T., Boleslawski, M., Irvine, G., Byung-Ki Kim, Hyeung-Ho Lee
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
Published in IEDM Technical Digest. IEEE International Electron Devices Meeting, 2004 (2004)
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Conference Proceeding