CMP에서 온도로 제어되는 제거 속도
TRAN HUYEN, LEE CHRISTOPHER HEUNG GYUN, MIKHAYLICHENKO EKATERINA A, IYER ANAND N, HIGASHI PATRICK A
Year of Publication 03.11.2023
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Year of Publication 03.11.2023
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CMP 성능을 개선하기 위한 플래튼 표면 변형 및 고성능 패드 컨디셔닝
LEE CHRISTOPHER HEUNG GYUN, TRAN HYUEN KAREN, IYER ANAND NILAKANTAN, CHEUNG GHUNBONG
Year of Publication 26.05.2023
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Year of Publication 26.05.2023
Patent
화학적 기계적 연마(CMP) 동안의 슬러리 감소를 위한 분무 시스템
CHEUNG TIFFANY YU NUNG, MIKHAYLICHENKO EKATERINA, LEE CHRISTOPHER HEUNG GYUN, IYER ANAND NILAKANTAN, CHOU CHIH CHUNG, RONDUM ERIK, CHANG SHOU SUNG
Year of Publication 20.02.2024
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Year of Publication 20.02.2024
Patent
CMP RETAINING RING FOR CMP
OH JEONGHOON, LEE CHRISTOPHER HEUNG GYUN, LI THOMAS, RONDUM ERIK S, IYER ANAND N, DIAO JIE, NAGENGAST ANDREW J, LEE WEI CHENG, ZHANG HUANBO
Year of Publication 19.07.2022
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Year of Publication 19.07.2022
Patent
CMP를 위한 리테이닝 링
OH JEONGHOON, LEE CHRISTOPHER HEUNG GYUN, LI THOMAS, RONDUM ERIK S, IYER ANAND N, DIAO JIE, NAGENGAST ANDREW J, LEE WEI CHENG, ZHANG HUANBO
Year of Publication 06.03.2019
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Year of Publication 06.03.2019
Patent
CMP SYSTEM AND PROCESS FOR IN SITU BYPRODUCT REMOVAL AND PLATEN COOLING DURING CMP
LEE CHRISTOPHER HEUNG GYUN, RONDUM ERIC S, DIAO JIE, KIM BUM JICK, LI THOMAS HO FAI
Year of Publication 17.08.2017
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Year of Publication 17.08.2017
Patent
ENGINEERING DIELECTRIC FILMS FOR CMP STOP
LEE CHRISTOPHER HEUNG GYUN, OSTERHELD THOMAS H, XIA LI QUN, WITTY DEREK R, MCCLINTOCK WILLIAM H, BALSEANU MIHAELA
Year of Publication 25.09.2014
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Year of Publication 25.09.2014
Patent
TEMPERATURE CONTROLLED RATE OF REMOVAL IN CMP
TRAN, Huyen, LEE, Christopher Heung-Gyun, HIGASHI, Patrick A, IYER, Anand N, MIKHAYLICHENKO, Ekaterina A
Year of Publication 09.09.2022
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Year of Publication 09.09.2022
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TEMPERATURE CONTROL WITH INTRA-LAYER TRANSITION DURING CMP
Lee, Christopher Heung-Gyun, Mikhaylichenko, Ekaterina A, Iyer, Anand N, Higashi, Patrick A, Tran, Huyen
Year of Publication 08.09.2022
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Year of Publication 08.09.2022
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SLURRY-BASED TEMPERATURE CONTROL FOR CMP
Lee, Christopher Heung-Gyun, Mikhaylichenko, Ekaterina A, Iyer, Anand N, Higashi, Patrick A, Tran, Huyen
Year of Publication 08.09.2022
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Year of Publication 08.09.2022
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CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE
Oh, Jeonghoon, Lischka, David J, Lee, Christopher Heung-Gyun, Gurusamy, Jay, Zuniga, Steven M, Cheung, Ghunbong, Zhang, Huanbo, Mikhaylichenko, Ekaterina A
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
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CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE
CHEUNG, Ghunbong, GURUSAMY, Jay, LEE, Christopher Heung-Gyun, OH, Jeonghoon, LISCHKA, David J, MIKHAYLICHENKO, Ekaterina A, ZUNIGA, Steven M, ZHANG, Huanbo
Year of Publication 02.05.2024
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Year of Publication 02.05.2024
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