Shallow trench isolation
Kim, Inki, Kim, Sang Yeon, Paek, Min, Ghee, Ch'ng Toh, Rajagopal, Ramakrishnan, Lee, Chiew Gie, Lee, Wan Gie, Chien, Choong Shiau, Tay, Charlie, Lee, Chang Gi, Watanabe, Hitomi, Inoue, Naoto
Year of Publication 15.08.2006
Get full text
Year of Publication 15.08.2006
Patent
Shallow trench isolation
KIM INKI, PAEK MIN, LEE CHIEW GIE, WATANABE HITOMI, GHEE CH'NG TOH, INOUE NAOTO, KIM SANG YEON, CHIEN CHOONG SHIAU, TAY CHARLIE, RAJAGOPAL RAMAKRISHNAN, LEE CHANG GI, LEE WAN GIE
Year of Publication 15.08.2006
Get full text
Year of Publication 15.08.2006
Patent