Heterogeneously integrated semiconductor device and manufacturing method thereof
Luo, Guang-Li, Hsu, Ta-Cheng, Chyi, Jen-Inn, Chang, Shih-Pang, Lee, Shih-Chang, Chen, Szu-Hung, Chen, Meng-Yang, Yeh, Wen-Kuan, Lee, Rong-Ren
Year of Publication 29.11.2022
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Year of Publication 29.11.2022
Patent