Novel EUV Underlayer Design for Metal Oxide Resist Patterning
Hwang, Ji Young, Lee, Jung June, Shin, Hyeon Woo, Ku, Bon Ki, Sim, Jae Hwan, Lim, Jae Bong
Published in Journal of Photopolymer Science and Technology (25.06.2024)
Published in Journal of Photopolymer Science and Technology (25.06.2024)
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Journal Article
Novel Fast Etch Rate BARC for ArF Immersion Lithography
Lee, Jung-June, Ahn, Jae-Yun, Jang, Min-Kyung, Shin, You Rim, Sim, Jae Hwan, Lim, Jae-Bong
Published in Journal of Photopolymer Science and Technology (25.06.2018)
Published in Journal of Photopolymer Science and Technology (25.06.2018)
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Journal Article
Indium-mediated one-pot synthesis of benzoxazoles or oxazoles from 2-nitrophenols or 1-aryl-2-nitroethanones
Lee, Jung June, Kim, Jihye, Jun, Young Moo, Lee, Byung Min, Kim, Byeong Hyo
Published in Tetrahedron (24.10.2009)
Published in Tetrahedron (24.10.2009)
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Journal Article
PHOTORESIST UNDERLAYER COMPOSITION
AHN JAE-YUN, LEE JUNG-JUNE, SHIN YOU RIM, GHANG YOO-JIN, SIM JAE-HWAN
Year of Publication 07.06.2024
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Year of Publication 07.06.2024
Patent
PHOTORESIST UNDERLAYER COMPOSITION
GHANG YOO JIN, AHN JAE YUN, SIM JAE HWAN, SHIN YOU RIM, LEE JUNG JUNE
Year of Publication 04.06.2024
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Year of Publication 04.06.2024
Patent
COMPOSITION FOR PHOTORESIST UNDERLAYER
PARK JIN HONG, BHOOSHAN POPERE, LEE JUNG-JUNE, KIM SUWOONG, SIM JAE-HWAN
Year of Publication 08.12.2022
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Year of Publication 08.12.2022
Patent
METHOD FOR FORMING PATTERN USING ANTIREFLECTIVE COATING COMPOSITION INCLUDING PHOTOACID GENERATOR
LIM JAE BONG, AHN JAE YUN, SIM JAE HWAN, LEE JUNG JUNE, KIM MYUNG YEOL, EMAD AQAD
Year of Publication 19.10.2023
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Year of Publication 19.10.2023
Patent