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Year of Publication 17.08.2021
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Year of Publication 17.08.2021
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Etching composition and method for manufacturing semiconductor device using the same
HAN HOON, LIM JUNG HUN, LEE JINWOO, PARK MIHYUN, LEE HYOSAN, KIM KEONYOUNG, LEE JIN UK, KIM JUNGAH
Year of Publication 27.03.2020
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Year of Publication 27.03.2020
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method for drying substrate photoresist developing method and photolithography method using the same
LEE KUNTACK, KIM YOUNG HOO, LEE HYOSAN, CHO YONG JHIN, CHOI SOO YOUNG, KOH CHAWON, PARK SUNGHYUN, CHA JI HOON
Year of Publication 25.05.2020
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Year of Publication 25.05.2020
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Pre-treatment composition before etching SiGe and method of fabricating a semiconductor device
KIM SOOJIN, LEE HYOSAN, KIM HAKSOO, KIM DONGHYUN, LEE MYUNG HO, LEE HYO SUN, OH JUNG MIN, OH JUNG JAE
Year of Publication 25.09.2019
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Year of Publication 25.09.2019
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clean composition cleaning apparatus and method for manufacturing semiconductor device
KIM YOUNG HOO, OH HAERIM, PARK MIHYUN, LEE HYOSAN, CHO MINHEE, JEONG JI SOO, OH JUNG MIN, KIM TAE KEUN, YEON YERIM
Year of Publication 16.08.2019
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Year of Publication 16.08.2019
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METHOD FOR DRYING SUBSTRATE
LEE KUNTACK, KO YONGSUN, LEE HYOSAN, JUN YONGMYUNG, CHO YONG JHIN, KIM SEOKHOON, KIM KYOUNGSEOB, KIM KWANGSU
Year of Publication 10.07.2018
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Year of Publication 10.07.2018
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METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT AND SUBSTRATE PROCESSING METHOD
LEE KUNTACK, KO YONGSUN, LEE HYOSAN, KIM SEOKHOON, KIM GYUNGSUB, KIMU KYONFAN
Year of Publication 07.03.2016
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Year of Publication 07.03.2016
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Improved etching method for microelectronic devices with supercritical carbon dioxide
Bae, Jae Hyun, Alam, Md. Zahangir, Jung, Jae Mok, Gal, Yeong-Soon, Lee, Hyosan, Kim, Hyun Gyu, Lim, Kwon Taek
Published in Microelectronic engineering (01.02.2009)
Published in Microelectronic engineering (01.02.2009)
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Journal Article
Conference Proceeding
ETCHING COMPOSITION AND METHOD OF MANUFACTURING INTEGRATED CIRCUITS USING THE SAME
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Year of Publication 22.02.2024
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Year of Publication 22.02.2024
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ETCHING COMPOSITION FOR TITANIUM-CONTAINING LAYER, ETCHING METHOD OF ETCHING TITANIUM-CONTAINING LAYER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE ETCHING COMPOSITION
SUNG, Minjae, OH, Jungmin, KIM, Sungmin, CHOI, Byoungki, LEE, Hyosan, HAM, Cheol, HWANG, Kyuyoung, KANG, Byungjoon, SONG, Gayoung
Year of Publication 26.09.2024
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Year of Publication 26.09.2024
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ETCHING COMPOSITION FOR TITANIUM-CONTAINING LAYER, ETCHING METHOD OF ETCHING TITANIUM-CONTAINING LAYER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE ETCHING COMPOSITION
SUNG, Minjae, OH, Jungmin, KIM, Sungmin, CHOI, Byoungki, LEE, Hyosan, HAM, Cheol, HWANG, Kyuyoung, KANG, Byungjoon, SONG, Gayoung
Year of Publication 28.08.2024
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Year of Publication 28.08.2024
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SLURRY COMPOSITION FOR CHEMICAL MECHANICAL POLISHING
KIM, Inkwon, KIM, Sangkyun, LEE, Hyosan, PARK, Sanghyun, HUR, Wonki, BYUN, Yearin
Year of Publication 06.04.2023
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Year of Publication 06.04.2023
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CLEANING COMPOSITION FOR REMOVING RESIDUES ON SURFACE, METHOD OF CLEANING METAL-CONTAINING FILM BY USING THE SAME, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY USING THE SAME
Kang, Byungjoon, Lee, Hyosan, Oh, Jungmin, Kim, Jiwon, Kim, Sungmin, Kim, Hwang Suk, Ham, Cheol, Choi, Byoungki, Hwang, Kyuyoung
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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ETCHING COMPOSITION AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
BAE, Sang Won, LEE, Hyosan, KANG, Bongkyun, BAE, Jinhye, OH, Jung-Min, KLIPP, Andreas, CHO, Minhyung, LIM, Geonja
Year of Publication 30.11.2023
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Year of Publication 30.11.2023
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Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same
Lee, Hyosan, Han, Hoon, Kim, Jungah, Kim, Keonyoung, Lim, Jung Hun, Lee, Jin Uk, Park, Mihyun, Lee, Jinwoo
Year of Publication 24.10.2023
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Year of Publication 24.10.2023
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