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Published in European journal of inorganic chemistry (03.01.2017)
Published in European journal of inorganic chemistry (03.01.2017)
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Journal Article
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Year of Publication 13.08.2024
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Year of Publication 13.08.2024
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Year of Publication 10.09.2024
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Year of Publication 10.09.2024
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인터커넥트 구조들을 위한 금속 라이너를 형성하는 방법
KASHEFI KEVIN, KIM YONG JIN, TANG XIANMIN, LEAL CERVANTES CARMEN, QU GE, WU ZHIYUAN, CHEN FENG
Year of Publication 16.04.2024
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Year of Publication 16.04.2024
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웨이퍼 표면들을 사전 세정하고 처리하기 위한 방법 및 장치
TANG XIANMIN, LEAL CERVANTES CARMEN, HA TAE HONG, TSAI CHENG HSIUNG MATTHEW, CHEN LU, CHEN FENG, XU WENJING, JANSEN ALEXANDER, KAMATH ARAVIND, XIE XIANGJIN
Year of Publication 08.02.2023
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Year of Publication 08.02.2023
Patent
Selective Barrier for Cu Interconnect Extension in 3nm Node and Beyond
You, Shi, Ren, He, Naik, Mehul, Chen, Lu, Chen, Feng, Cervantes, Carmen Leal, Xie, Xiangjing, Kashefizadeh, Keyvan
Published in 2021 IEEE International Interconnect Technology Conference (IITC) (06.07.2021)
Published in 2021 IEEE International Interconnect Technology Conference (IITC) (06.07.2021)
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Conference Proceeding
METHODS OF FORMING INTERCONNECT STRUCTURES
CEN, Jiajie, LEAL CERVANTES, Carmen, KIM, Yong Jin, KASHEFI, Kevin, WANG, Xiaodong
Year of Publication 02.08.2024
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Year of Publication 02.08.2024
Patent