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Year of Publication 12.04.2018
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Beam reverser module and optical power amplifier having such a beam reverser module
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Year of Publication 12.12.2017
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Year of Publication 12.12.2017
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Beam Reverser Module and Optical Power Amplifier Having Such a Beam Reverser Module
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Year of Publication 26.11.2015
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Year of Publication 01.01.2013
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Year of Publication 16.10.2012
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Method for measuring a spectrum of a narrowband light source, and spectrometer arrangement
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Year of Publication 16.10.2012
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Year of Publication 16.10.2012
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REFLECTIVE OPTICAL ELEMENT FOR USE IN EUV SYSTEM
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Year of Publication 17.03.2011
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METHOD OF MEASURING SPECTRUM OF NARROW BAND LIGHT SOURCE AND SPECTROMETER ARRANGEMENT
HERKOMMER ALOIS, CLAUS JOHANNES, WEIGL BERNHARD, MAIRE MICHEL LE, MUENZ HOLGER
Year of Publication 15.04.2010
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Year of Publication 15.04.2010
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METHOD FOR MEASURING A SPECTRUM OF A NARROWBAND LIGHT SOURCE, AND SPECTROMETER ARRANGEMENT
HERKOMMER ALOIS, KRAUS JOHANNES, WEIGL BERNHARD, MAIRE MICHEL LE, MUENZ HOLGER
Year of Publication 01.04.2010
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Year of Publication 01.04.2010
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Optical devices and related systems and methods
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Year of Publication 08.12.2009
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Year of Publication 08.12.2009
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Verfahren zum Messen eines Spektrums einer schmalbandigen Lichtquelle sowie Spektrometeranordnung
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Year of Publication 08.12.2011
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Year of Publication 08.12.2011
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Verfahren zum Messen eines Spektrums einer schmalbandigen Lichtquelle sowie Spektrometeranordnung
MUENZ, HOLGER, WEIGL, BERNHARD, KRAUS, JOHANNES, HERKOMMER, ALOIS, MAIRE, MICHEL LE
Year of Publication 15.04.2010
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Year of Publication 15.04.2010
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Reflective optical element for use in an EUV system
LE MAIRE MICHEL, KIEREY HOLGER, LENGEL ANTON, ANDERL WILLI, HOLDERER HUBERT
Year of Publication 01.01.2013
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Year of Publication 01.01.2013
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