Stabilised cyclosiloxanes for use as precursors for low-dielectric constant thin films
TIANNIU CHEN, CHONGYING XU, THOMAS H BAUM, ALEXANDER S. BOROVIK, RAVI K. LAXMAN
Year of Publication 02.03.2005
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Year of Publication 02.03.2005
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COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS
XU, CHONGYING, BAUM, THOMAS, H, LAXMAN, RAVI, K, ROEDER, JEFFREY, HENDRIX, BRYAN, WANG, ZIYUN
Year of Publication 26.08.2004
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Year of Publication 26.08.2004
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COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON, SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE
THOMAS, H. BAUM, CHONGYING XU, BRYAN HENDRIX, RAVI, K. LAXMAN, ZIYUN WANG, JEFFREY ROEDER
Year of Publication 03.06.2004
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Year of Publication 03.06.2004
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Composition and method for low temperature deposition of silicon-containing films
CHONGYING XU, BRYAN HENDRIX, ZIYUN WANG, JEFFREY ROEDER, THOMAS H. BAUM, RAVI K. LAXMAN
Year of Publication 03.06.2004
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Year of Publication 03.06.2004
Patent
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON, SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE
XU, CHONGYING, BAUM, THOMAS, H, LAXMAN, RAVI, K, ROEDER, JEFFREY, HENDRIX, BRYAN, WANG, ZIYUN
Year of Publication 27.05.2004
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Year of Publication 27.05.2004
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Composition and method for low temperature deposition of silicon-containing films such as films including silicon nitride, silicon dioxide and/or silicon-oxynitride
LAXMAN RAVI K, XU CHONGYING, ROEDER JEFFREY, BAUM THOMAS H, HENDRIX BRYAN, WANG ZIYUN
Year of Publication 20.05.2004
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Year of Publication 20.05.2004
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Stabilized cyclosiloxanes for use as CVD precursors for low-dielectric constant thin films
LAXMAN RAVI K, XU CHONGYING, BOROVIK ALEXANDER S, BAUM THOMAS H, CHEN TIANNIU
Year of Publication 26.02.2004
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Year of Publication 26.02.2004
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Low decomposition storage a tantalum precursor
DUSSARRAT, CHRISTIAN, LETESSIER, OLIVIER, LAXMAN, RAVI K, STAFFORD, NATHAN
Year of Publication 01.09.2009
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Year of Publication 01.09.2009
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Method and apparatus to help promote contact of gas with vaporized material
LAXMAN RAVI K, SCOTT BATTLE, DONN NAITO, JOHN GREGG, BANTON JEFFREY I
Year of Publication 08.12.2010
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Year of Publication 08.12.2010
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CHEMICAL VAPOR GROWTH OF SILICON NITRIDE FROM BIS (TERTIARY-BUTYLAMINO) SILANE
HOCKENHULL HERMAN GENE, LAXMAN RAVI K, ROBERTS DAVID A, KAMINSKY FELICIA DIANE, HOCHBERG ARTHUR KENNETH
Year of Publication 29.06.1999
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Year of Publication 29.06.1999
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Vaporizer delivery ampoule
SCOTT BATTLE, MARIANNE FUIERER, DONN NAITO, RAVI K. LAXMAN, JOHN GREGG, JEFFREY I. BANTON
Year of Publication 21.11.2008
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Year of Publication 21.11.2008
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Fluorine doped silicon oxide process
HOCHBERG; ARTHUR K, ROBERTS; DAVID A, VRTIS; RAYMOND N, LAXMAN; RAVI K
Year of Publication 20.02.1996
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Year of Publication 20.02.1996
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