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Year of Publication 19.06.2014
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Low decomposition storage of a tantalum precursor
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Year of Publication 03.01.2012
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Low decomposition storage of a tantalum precursor
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Year of Publication 03.01.2012
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NAITO DONN K, LAXMAN RAVI K, GREGG JOHN N, BATTLE SCOTT L, BANTON JEFFREY I
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Year of Publication 05.09.2013
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Method and apparatus to help promote contact of gas with vaporized material
NAITO DONN K, LAXMAN RAVI K, GREGG JOHN N, BATTLE SCOTT L, BANTON JEFFREY I
Year of Publication 21.05.2013
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Year of Publication 21.05.2013
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
NAITO DONN, LAXMAN RAVI K, BATTLE SCOTT, GREGG JOHN, BANTON JEFFREY I
Year of Publication 14.03.2013
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Year of Publication 14.03.2013
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VAPORIZER DELIVERY AMPOULE
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Year of Publication 05.12.2012
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Year of Publication 05.12.2012
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LOW DECOMPOSITION STORAGE OF A TANTALUM PRECURSOR
DUSSARRAT, CHRISTIAN, LETESSIER, OLIVIER, LAXMAN, RAVI K, STAFFORD, NATHAN
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Year of Publication 23.12.2009
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COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CONTAINING FILMS SUCH AS FILMS INCLUDING SILICON, SILICON NITRIDE, SILICON DIOXIDE AND/OR SILICON-OXYNITRIDE
LAXMAN RAVI K, XU CHONGYING, ROEDER JEFFREY, BAUM THOMAS H, HENDRIX BRYAN, WANG ZIYUN
Year of Publication 12.07.2012
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Year of Publication 12.07.2012
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
GREG, JOHN, BANTON, JEFFRY, I, LAXMAN, RAVI, K, NAITO, DONN, BATTLE, SCOTT
Year of Publication 27.04.2012
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Year of Publication 27.04.2012
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VAPORIZER DELIVERY AMPOULE
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Year of Publication 27.04.2012
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Year of Publication 27.04.2012
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Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride
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Year of Publication 10.04.2012
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Year of Publication 10.04.2012
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Method and apparatus to help promote contact of gas with vaporized material
NAITO DONN K, LAXMAN RAVI K, GREGG JOHN N, BATTLE SCOTT L, BANTON JEFFREY I
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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Method and apparatus to help promote contact of gas with vaporized material
Gregg, John N, Battle, Scott L, Banton, Jeffrey I, Naito, Donn K, Laxman, Ravi K
Year of Publication 06.03.2012
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Year of Publication 06.03.2012
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LOW DECOMPOSITION STORAGE OF A TANTALUM PRECURSOR
DUSSARRAT, CHRISTIAN, LETESSIER, OLIVIER, LAXMAN, RAVI K, STAFFORD, NATHAN
Year of Publication 02.07.2009
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Year of Publication 02.07.2009
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Low Decomposition Storage of a Tantalum Precursor
LAXMAN RAVI K, DUSSARRAT CHRISTIAN, LETESSIER OLIVIER, STAFFORD NATHAN
Year of Publication 25.06.2009
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Year of Publication 25.06.2009
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Vaporizer delivery ampoule
BANTON, JEFFREY I, FUIERER, MARIANNE, GREGG, JOHN, LAXMAN, RAVI K, NAITO, DONN, BATTLE, SCOTT
Year of Publication 23.11.2011
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Year of Publication 23.11.2011
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METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
BANTON, JEFFRY, I, LAXMAN, RAVI, K, GREGG, JOHN, NAITO, DONN, BATTLE, SCOTT
Year of Publication 26.10.2011
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Year of Publication 26.10.2011
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Vaporizer delivery ampoule
BANTON, JEFFREY I, FUIERER, MARIANNE, GREGG, JOHN, LAXMAN, RAVI K, NAITO, DONN, BATTLE, SCOTT
Year of Publication 31.08.2011
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Year of Publication 31.08.2011
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Composition and method for low temperature deposition of silicon-containing films such as films including silicon, silicon nitride, silicon dioxide and/or silicon-oxynitride
Wang, Ziyun, Xu, Chongying, Laxman, Ravi K, Baum, Thomas H, Hendrix, Bryan C, Roeder, Jeffrey F
Year of Publication 22.03.2011
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Year of Publication 22.03.2011
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