SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
VAN ABEELEN HENDRIKUS JOHANNES MARINUS, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, DASSEN ARMAND ROSA JOZEF, KUNNEN JOHAN GERTRUDIS CORNELIS, HOUBEN MARTIJN
Year of Publication 01.10.2015
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Year of Publication 01.10.2015
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EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
WATERSON, Nicholas, Peter, RAVENSBERGEN, Simon, Karel, HOUBEN, Martijn, KRAMER, Gijs, ROSET, Niek, Jacobus, Johannes, CLOOSTERMAN, Vincentius, Fransiscus, BALTIS, Coen, Hubertus, Matheus, VAN DE VIJVER, Yuri, Johannes, Gabriël, TROMP, Siegfried, Alexander, GERRITZEN, Justin, Johannes, Hermanus, LAURENT, Thibault, Simon, Mathieu, VERMEULEN, Marcus, Martinus, Petrus, Adrianus
Year of Publication 16.11.2017
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Year of Publication 16.11.2017
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EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
SIEGFRIED ALEXANDER TROMP, THIBAULT SIMON MATHIEU LAURENT, JUSTIN JOHANNES HERMANUS GERRITZEN, MARTIJN HOUBEN, NICHOLAS PETER WATERSON, SIMON KAREL RAVENSBERGEN, VINCENTIUS FRANSISCUS CLOOSTERMAN, YURI JOHANNES GABRIËL VAN DE VIJVER, MARCUS MARTINUS PETRUS ADRIANUS VERMEULEN, NIEK JACOBUS JOHANNES ROSET, COEN HUBERTUS METHEUS BALTIS, GIJS KRAMER
Year of Publication 15.11.2017
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Year of Publication 15.11.2017
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OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
TROMP Siegfried Alexander, BLOKS Ruud Hendrikus Martinus Johannes, VY Van Vuong, HOUBEN Martijn, CORTIE Rogier Hendrikus Magdalena, OVERKAMP Jim Vincent, STEFFENS Koen, LEMPENS Han Henricus Aldegonda, LAURENT Thibault Simon Mathieu, POLET Theodorus Wilhelmus, LAFARRE Raymond Wilhelmus Louis, JACOBS Johannes Henricus Wilhelmus, PIETERSE Gerben, SIMONS Wilhelmus Franciscus Johannes
Year of Publication 02.11.2017
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Year of Publication 02.11.2017
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Object holder and lithographic apparatus
Jacobs Johannes Henricus Wilhelmus, Lempens Han Henricus Aldegonda, Pieterse Gerben, Tromp Siegfried Alexander, Steffens Koen, Houben Martijn, Polet Theodorus Wilhelmus, Bloks Ruud Hendrikus Martinus Johannes, Lafarre Raymond Wilhelmus Louis, Simons Wilhelmus Franciscus Johannes, Cortie Rogier Hendrikus Magdalena, Vy Van Vuong, Overkamp Jim Vincent, Laurent Thibault Simon Mathieu
Year of Publication 10.10.2017
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Year of Publication 10.10.2017
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Sensor, lithographic apparatus and device manufacturing method
Jacobs Johannes Henricus Wilhelmus, Kok Haico Victor, Westerlaken Jan Steven Christiaan, Van De Rijdt Johannes Hubertus Antonius, Kooiker Allard Eelco, Hurkens-Mertens Wilhelmina Margareta Jozef, Voogd Robbert Jan, Van De Vijver Yuri Johannes Gabriël, Van De Wal Johannes Antonius Maria, Knarren Bastiaan Andreas Wilhelmus Hubertus, Teillet Yohann Bruno Yvon, Laurent Thibault Simon Mathieu
Year of Publication 05.09.2017
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Year of Publication 05.09.2017
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LITHOGRAPHIC APPARATUS AND METHOD
STEFFENS KOEN, KANEKO TAKESHI, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, CORCORAN GREGORY MARTIN MASON, KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS, LAURENT THIBAULT SIMON MATHIEU, KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA, VOOGD ROBBERT JAN, KUNNEN JOHAN GERTRUDIS CORNELIS, BADIE RAMIN, LAFARRE RAYMOND WILHELMUS LOUIS
Year of Publication 14.07.2016
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Year of Publication 14.07.2016
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A Lithographic Apparatus and a Method of Manufacturing a Lithographic Apparatus
ADRIANUS HENDRIK KOEVOETS, THIBAULT SIMON MATHIEU LAURENT, CHRISTIANUS WILHELMUS JOHANNES BERENDSEN, JIM VINCENT OVERKAMP, ROGIER HENDRIKUS MAGDALENA CORTIE, PATRICIUS JACOBUS NEEFS, RUUD HENDRICUS MARTINUS JOHANNES BLOKS, MICHAEL JOHANNES HENDRIKA WILHELMINA RENDERS, PUTRA SAPUTRA, JOHAN GERTRUDIS CORNELIS KUNNEN
Year of Publication 08.07.2016
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Year of Publication 08.07.2016
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Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method
VAN ABEELEN HENDRIKUS JOHANNES MARINUS, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, DASSEN ARMAND ROSA JOZEF, KUNNEN JOHAN GERTRUDIS CORNELIS, HOUBEN MARTIJN
Year of Publication 03.03.2015
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Year of Publication 03.03.2015
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Lithographic apparatus and method
STEFFENS KOEN, KANEKO TAKESHI, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, CORCORAN GREGORY MARTIN MASON, KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS, LAURENT THIBAULT SIMON MATHIEU, KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA, VOOGD ROBBERT JAN, KUNNEN JOHAN GERTRUDIS CORNELIS, BADIE RAMIN, LAFARRE RAYMOND WILHELMUS LOUIS
Year of Publication 29.03.2016
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Year of Publication 29.03.2016
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A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM
BLOKS, RUUD, HENDRICUS, MARTINUS, JOHANNES, NEEFS, PATRICIUS, JACOBUS, OVERKAMP, JIM, VINCENT, RENDERS, MICHAEL, JOHANNES, HENDRIKA, WILHELMINA, KUNNEN, JOHAN, GERTRUDIS, CORNELIS, LAURENT, THIBAULT, SIMON, MATHIEU, KOEVOETS, ADRIANUS, HENDRIK, SAPUTRA, PUTRA, BERENDSEN, CHRISTIANUS, WILHELMUS, JOHANNES, CORTIE, ROGIER, HENDRIKUS, MAGDALENA
Year of Publication 11.02.2016
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Year of Publication 11.02.2016
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LITHOGRAPHIC APPARATUS
VAN BOXTEL FRANK JOHANNES JACOBUS, WESTERLAKEN JAN STEVEN CHRISTIAAN, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, SCHUSTER MARK JOSEF, DELMASTRO PETER A, WARD CHRISTOPHER CHARLES, LAURENT THIBAULT SIMON MATHIEU, VERDIRAME JUSTIN MATTHEW, NAYFEH SAMIR A, LEENDERS MARTINUS HENDRIKUS ANTONIUS
Year of Publication 18.06.2015
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Year of Publication 18.06.2015
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SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
VAN ABEELEN HENDRIKUS JOHANNES MARINUS, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, DASSEN ARMAND ROSA JOZEF, KUNNEN JOHAN GERTRUDIS CORNELIS, HOUBEN MARTIJN
Year of Publication 18.04.2013
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Year of Publication 18.04.2013
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SUBSTRATE TABLE ASSEMBLY, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
MARTIN HUBEN, VAN BOXTEL FRANK JOHANNES JACOBUS, LAMBERTUS DONDERS SJOERD NICOLAAS, SANDER KATHARINA REINIER DERKS, JACOBS JOHANNES HENRICUS WILHELMUS, LAURENT THIBAULT SIMON MATHIEU, KUNNEN JOHAN GERTRUDIS CORNELIS
Year of Publication 21.02.2013
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Year of Publication 21.02.2013
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SUBSTRATE TABLE ASSEMBLY, AN IMMERSION LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
VAN BOXTEL FRANK JOHANNES JACOBUS, JACOBS JOHANNES HENRICUS WILHELMUS, LAURENT THIBAULT SIMON MATHIEU, DERKS SANDER CATHARINA REINIER, DONDERS SJOERD NICOLAAS LAMBERTUS, KUNNEN JOHAN GERTRUDIS CORNELIS, HOUBEN MARTIJN
Year of Publication 14.02.2013
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Year of Publication 14.02.2013
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OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
STEFFENS KOEN, PIETERSE GERBEN, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, JACOBS JOHANNES HENRICUS WILHELMUS, SIMONS WILHELMUS FRANCISCUS JOHANNES, LAFARRE RAYMOND WILHELMUS LOUIS, VY VAN VUONG, HOUBEN MARTIJN, OVERKAMP JIM VINCENT, TROMP SIEGFRIED ALEXANDER, LAURENT THIBAULT SIMON MATHIEU, LEMPENS HAN HENRICUS ALDEGONDA, POLET THEODORUS WILHELMUS, CORTIE ROGIER HENDRIKUS MAGDALENA
Year of Publication 14.05.2015
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Year of Publication 14.05.2015
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SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
WESTERLAKEN JAN STEVEN CHRISTIAAN, VAN DE RIJDT JOHANNES HUBERTUS ANTONIUS, VAN DE VIJVER YURI JOHANNES GABRIËL, KNARREN BASTIAAN ANDREAS WILHELMUS HUBERTUS, HURKENS-MERTENS WILHELMINA MARGARETA JOZEF, JACOBS JOHANNES HENRICUS WILHELMUS, LAURENT THIBAULT SIMON MATHIEU, KOOIKER ALLARD EELCO, TEILLET YOHANN BRUNO YVON, KOK HAICO VICTOR, VOOGD ROBBERT JAN, VAN DE WAL JOHANNES ANTONIUS MARIA
Year of Publication 19.03.2015
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Year of Publication 19.03.2015
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A measurement substrate and a measurement method
MAKINWA, KOFI AFOLABI ANTHONY, LAURENT, THIBAULT SIMON MATHIEU, BLOKS, RUUD HENDRIKUS MARTINUS JOHANNES, VERMEULEN, JOHANNES PETRUS MARTINUS BERNARDUS, DE LA ROSETTE, JOHANNES PAUL MARIE, NIHTIANOV, STOYAN, NEEFS, PATRICIUS JACOBUS
Year of Publication 11.01.2019
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Year of Publication 11.01.2019
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FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
THIBAULT SIMON MATHIEU LAURENT, BLOKS RUUD HENDRIKUS MARTINUS JOHANNES, THOMAS IVO ADAM JOHANNES, GERBEN PETERS, GUNTHER PIETER LEIN JOSEPH, VERSPAGET COEN CORNELIS WILHELMUS, VAN DER HAM RONALD, GREGORY MARTIN MASON CORCORAN
Year of Publication 21.03.2013
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Year of Publication 21.03.2013
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