WAFER SPOT HEATING WITH BEAM WIDTH MODULATION
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, NAKANISHI KOJI, NAKAGAWA TOSHIYUKI
Year of Publication 25.04.2024
Get full text
Year of Publication 25.04.2024
Patent
이중 단부 램프를 갖는 축대칭 가열 어셈블리 레이아웃
YE ZHIYUAN, DUBE ABHISHEK, CHOO ENLE, NELLIKKA SHAINISH, LAU SHU KWAN, WANG DANNY DON, NAKAGAWA TOSHIYUKI
Year of Publication 18.12.2023
Get full text
Year of Publication 18.12.2023
Patent
EPI 챔버를 위한 인-시튜 온도 매핑
YE ZHIYUAN, CHOO ENLE, MORADIAN ALA, LIU PATRICIA M, ZHU ZUOMING, LAU SHU KWAN, CHANG FLORA FONG SONG
Year of Publication 29.11.2022
Get full text
Year of Publication 29.11.2022
Patent
낮은 질량의 기판 지지체
AMOS JAMES M, YE ZHIYUAN, NEWMAN JOHN, CHEN HUI, WASHINGTON LORI D, BONHAM SHAWN JOSEPH, LUAN XINNING, LAU SHU KWAN, ERHARDT AIMEE S, AMOS PHILIP MICHAEL, FISHER KIRK ALLEN
Year of Publication 29.01.2024
Get full text
Year of Publication 29.01.2024
Patent
뱃치 열 프로세스 챔버
PANDEY VISHWAS KUMAR, CHU SCHUBERT S, MORADIAN ALA, TANNOUS ADEL GEORGE, ZHU ZUOMING, CHIN CHIA CHENG, LAU SHU KWAN, RANGAPPA SRINIVASA, SHAH KARTIK BHUPENDRA, KUMAR SURAJIT
Year of Publication 29.11.2022
Get full text
Year of Publication 29.11.2022
Patent
에피택셜 증착 챔버
YE ZHIYUAN, DUBE ABHISHEK, CHOO ENLE, MORADIAN ALA, WANG DANNY D, NELLIKKA SHAINISH, BURROWS BRIAN HAYES, LAU SHU KWAN, COLLINS RICHARD O, SHAH KARTIK BHUPENDRA, NAKAGAWA TOSHIYUKI
Year of Publication 19.05.2023
Get full text
Year of Publication 19.05.2023
Patent
EPI MULTI ZONE SPOT HEATING IN EPI
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, SANCHEZ ERROL ANTONIO C, NAKANISHI KOJI, RANISH JOSEPH M, NAKAGAWA TOSHIYUKI
Year of Publication 30.03.2022
Get full text
Year of Publication 30.03.2022
Patent
뱃치 열 프로세스 챔버에서 웨이퍼 에지 온도 보정
PANDEY VISHWAS KUMAR, CHU SCHUBERT S, MORADIAN ALA, TANNOUS ADEL GEORGE, ZHU ZUOMING, BURROWS BRIAN HAYES, MYO NYI O, LAU SHU KWAN, RANGAPPA SRINIVASA, SHAH KARTIK BHUPENDRA, KUMAR SURAJIT
Year of Publication 28.11.2022
Get full text
Year of Publication 28.11.2022
Patent
빔 폭 변조를 이용한 웨이퍼 스폿 가열
YE ZHIYUAN, CHU SCHUBERT S, ZHU ZUOMING, MYO NYI O, LAU SHU KWAN, NAKANISHI KOJI, NAKAGAWA TOSHIYUKI
Year of Publication 13.01.2021
Get full text
Year of Publication 13.01.2021
Patent
공유 가스 전달 및 배기 시스템을 갖는 다중-열 CVD 챔버들
YE ZHIYUAN, CHU SCHUBERT S, HILKENE MARTIN A, MYO NYI O, LAU SHU KWAN DANNY, WASHINGTON LORI, HEMKAR MANISH, COLLINS RICHARD O, BURROWS BRIAN H, DINIZ HERMAN
Year of Publication 25.08.2022
Get full text
Year of Publication 25.08.2022
Patent