EPI THICKNESS TUNING BY PULSE OR PROFILE SPOT HEATING
LAU, Shu-Kwan Danny, CHU, Schubert S, YE, Zhiyuan, SANCHEZ, Errol Antonio C, ZHU, Zuoming, MYO, Nyi O
Year of Publication 29.08.2019
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Year of Publication 29.08.2019
Patent
EPI THICKNESS TUNING BY PULSE OR PROFILE SPOT HEATING
CHU, Schubert, LAU, Shu-Kwan, YE, Zhiyuan, SANCHEZ, Errol Antonio C, ZHU, Zuoming, MYO, Nyi O
Year of Publication 29.08.2019
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Year of Publication 29.08.2019
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TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRATE AND SUSCEPTOR IN AN EPITAXY CHAMBER
CHANG, Flora Fong-Song, MORADIAN, Ala, CHOO, Enle, NESTOROV, Vilen K, LIU, Patricia M, MARATH SANKARATHODI, Bindusagar, SRIVASTAVA, Surendra Singh, ZHU, Zuoming, CHU, Schubert S, SHAPOSHNIKOV, Maxim D, CHOPRA, Saurabh, LAU, Shu-Kwan, LIN, Jenny C, YE, Zhiyuan, CONG, Zhepeng, SANCHEZ, Errol Antonio C
Year of Publication 19.05.2022
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Year of Publication 19.05.2022
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HEATING MODULATORS TO IMPROVE EPI UNIFORMITY TUNING
RANISH, Joseph M, SAMIR, Mehmet Tugrul, KUMAR, Surajit, LAU, Shu-Kwan, YE, Zhiyuan, SANCHEZ, Errol Antonio C, SHAH, Kartik
Year of Publication 01.04.2020
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Year of Publication 01.04.2020
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Flow guide structures and heat shield structures, and related methods, for deposition uniformity and process adjustability
KIRSCHENHEITER, THOMAS, CHOPRA, SAURABH, SALINAS, MARTIN JEFFREY, CHIN, CHIANG, LAU, SHU-KWAN, TOLLE, JOHN, ZHU, ZUOMING, MORADIAN, ALA, SUBBANNA, MANJUNATH
Year of Publication 16.01.2024
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Year of Publication 16.01.2024
Patent