Heating modulators to improve EPI uniformity tuning
LAU, SHU-KWAN, KUMAR, SURAJIT, SAMIR, MEHMET TUGRUL, SANCHEZ, ERROL ANTONIO C, SHAH, KARTIK, YE, ZHI-YUAN, RANISH, JOSEPH M
Year of Publication 16.03.2018
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Year of Publication 16.03.2018
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Quartz upper and lower domes
CHANG, ANZHONG, SAMIR, MEHMET TUGRUL, KUMAR, SURAJIT, ZHU, ZUOMING, BRILLHART, PAUL, IU, DONGMING, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, SEREBRYANOV, OLEG, RANISH, JOSEPH M, ABOAGYE, STEVE, CARLSON, DAVID K, LAU, SHU-KWAN, NGUYEN, ANH N, DINIZ, HERMAN
Year of Publication 11.10.2018
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Year of Publication 11.10.2018
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Quartz upper and lower domes
ABOAGYE STEVE, SAMIR MEHMET TUGRUL, CARLSON DAVID K, NGUYEN ANH N, SEREBRYANOV OLEG, LAU SHU-KWAN, CHANG ANZHONG, BRILLHART PAUL, RANISH JOSEPH M, PATALAY KAILASH KIRAN, ZHU ZOUMING, IU DONGMING, KUMAR SURAJIT, KUPPURAO SATHEESH, DINIZ HERMAN
Year of Publication 03.08.2018
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Year of Publication 03.08.2018
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Carbon fiber ring susceptor
SAMIR, MEHMET TUGRUL, LAU, SHU-KWAN, KUMAR, SURAJIT, BRILLHART, PAUL, RANISH, JOSEPH M
Year of Publication 01.06.2015
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Year of Publication 01.06.2015
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Quartz upper and lower domes
ABOAGYE STEVE, SEREBRYANOV OLEG V, SAMIR MEHMET TUGRUL, CARLSON DAVID K, NGUYEN ANH N, LAU SHU-KWAN, CHANG ANZHONG, BRILLHART PAUL, RANISH JOSEPH M, PATALAY KAILASH KIRAN, ZHU ZUOMING, IU DONGMING, KUMAR SURAJIT, KUPPURAO SATHEESH, DINIZ HERMAN
Year of Publication 02.02.2018
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Year of Publication 02.02.2018
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Atmospheric epitaxial deposition chamber
SAMIR MEHMET TUGRUL, HUNTER AARON MUIR, MYO NYI OO, MILLER AARON, LAU SHU-KWAN, BRILLHART PAUL, SANCHEZ ERROL ANTONIO C, RANISH JOSEPH M, SHAH KARTIK, KUPPURAO SATHEESH, DEMARS DENNIS L
Year of Publication 24.05.2017
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Year of Publication 24.05.2017
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Susceptor support shaft with uniformity tuning lenses for EPI process
SAMIR, MEHMET TUGRUL, LAU, SHU-KWAN, CONG, ZHEPENG, LI, XUE-BIN, BRILLHART, PAUL, ISHII, MASATO, RAMACHANDRAN, BALASUBRAMANIAN
Year of Publication 16.09.2014
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Year of Publication 16.09.2014
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Atmospheric epitaxial deposition chamber
HUNTER, AARON MUIR, LAU, SHU-KWAN, SAMIR, MEHMET TUGRUL, MYO, NYI OO, SANCHEZ, ERROL ANTONIO C, BRILLHART, PAUL, SHAH, KARTIK, DEMARS, DENNIS L, KUPPURAO, SATHEESH, MILLER, AARON, RANISH, JOSEPH M
Year of Publication 16.05.2016
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Year of Publication 16.05.2016
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Epitaxial chamber with customizable flow injection
CARLSON, DAVID K, LAU, SHU-KWAN, SAMIR, MEHMET TUGRUL, SANCHEZ, ERROR ANTONIO C, CONG, ZHEPENG, LI, XUE-BIN, SRINIVASAN, SWAMINATHAN, YE, ZHI-YUAN
Year of Publication 16.05.2014
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Year of Publication 16.05.2014
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Quartz upper and lower domes
CHANG, ANZHONG, SAMIR, MEHMET TUGRUL, KUMAR, SURAJIT, ZHU, ZUOMING, BRILLHART, PAUL, IU, DONGMING, KUPPURAO, SATHEESH, PATALAY, KAILASH KIRAN, SEREBRYANOV, OLEG, RANISH, JOSEPH M, ABOAGYE, STEVE, CARLSON, DAVID K, LAU, SHU-KWAN, NGUYEN, ANH N, DINIZ, HERMAN
Year of Publication 16.08.2014
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Year of Publication 16.08.2014
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