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Epitaxial (EPI) thickness adjustment performed by pulse or contoured point heating
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Year of Publication 01.10.2023
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Heating modulators to improve epi uniformity tuning
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Year of Publication 20.11.2018
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Methods of correlating zones of processing chambers, and related systems and methods
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Year of Publication 01.05.2024
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HEATING MODULATORS TO IMPROVE EPI UNIFORMITY TUNING
RANISH, Joseph M, SAMIR, Mehmet Tugrul, KUMAR, Surajit, LAU, Shu-Kwan, YE, Zhiyuan, SANCHEZ, Errol Antonio C, SHAH, Kartik
Year of Publication 29.05.2019
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Year of Publication 29.05.2019
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