공유 가스 전달 및 배기 시스템을 갖는 다중-열 CVD 챔버들
YE ZHIYUAN, CHU SCHUBERT S, HILKENE MARTIN A, MYO NYI O, LAU SHU KWAN DANNY, WASHINGTON LORI, HEMKAR MANISH, COLLINS RICHARD O, BURROWS BRIAN H, DINIZ HERMAN
Year of Publication 25.08.2022
Get full text
Year of Publication 25.08.2022
Patent
EPI chamber with full wafer laser heating
Tannous, Adel George, Lau, Shu-Kwan Danny, Genis, Patrick C, Ye, Zhiyuan
Year of Publication 09.07.2024
Get full text
Year of Publication 09.07.2024
Patent
EPI CHAMBER WITH FULL WAFER LASER HEATING
LAU, Shu-Kwan Danny, GENIS, Patrick C, TANNOUS, Adel George, YE, Zhiyuan
Year of Publication 03.03.2022
Get full text
Year of Publication 03.03.2022
Patent
EPI thickness tuning by pulse or profile spot heating
Sanchez, Errol Antonio C, Myo, Nyi O, Zhu, Zuoming, Lau, Shu-Kwan Danny, Chu, Schubert S, Ye, Zhiyuan
Year of Publication 08.09.2020
Get full text
Year of Publication 08.09.2020
Patent
EPI THICKNESS TUNING BY PULSE OR PROFILE SPOT HEATING
LAU, Shu-Kwan Danny, CHU, Schubert S, YE, Zhiyuan, SANCHEZ, Errol Antonio C, ZHU, Zuoming, MYO, Nyi O
Year of Publication 29.08.2019
Get full text
Year of Publication 29.08.2019
Patent
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
LAU, Shu-Kwan Danny, CHANG, Flora Fong-Song, MORADIAN, Ala, CHOO, Enle, CHU, Schubert, LIU, Patricia M, HILKENE, Martin A, MARATH SANKARATHODI, Bindusagar, SRIVASTAVA, Surendra Singh, ZHU, Zuoming, LIN, Jenny, MYO, Nyi O, YE, Zhiyuan, SHERVEGAR, Avinash, SANCHEZ, Errol Antonio C
Year of Publication 11.02.2021
Get full text
Year of Publication 11.02.2021
Patent
Methods for detection using optical emission spectroscopy
HILKENE, MARTIN A, ZHU, ZUOMING, CHANG, FLORA FONG-SONG, YE, ZHIYUAN, CHU, SCHUBERT, MYO, NYI O, MARATH SANKARATHODI, BINDUSAGAR, CHOO, ENLE, SANCHEZ, ERROL ANTONIO C, SHERVEGAR, AVINASH, MORADIAN, ALA, LAU, SHU-KWAN DANNY, LIU, PATRICIA M, LIN, JENNY, SRIVASTAVA, SURENDRA SINGH
Year of Publication 21.05.2024
Get full text
Year of Publication 21.05.2024
Patent