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Year of Publication 26.10.2011
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Year of Publication 14.12.2010
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Year of Publication 14.12.2010
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Method for producing a micromechanical component having a thin-layer capping
FUCHS TINO, KRONMUELLER SILVIA, LAMMER MARCO, LEINENBACH CHRISTINA, FEYH ANDO
Year of Publication 14.12.2010
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Year of Publication 14.12.2010
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METHOD FOR PRODUCING A MICROMECHANICAL COMPONENT HAVING A THIN-LAYER CAPPING
FUCHS TINO, KRONMUELLER SILVIA, LAMMER MARCO, LEINENBACH CHRISTINA, FEYH ANDO
Year of Publication 07.01.2010
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Year of Publication 07.01.2010
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