Showing
1 - 20
results of
68
for search '
"LAM, HIEU A"
'
Skip to content
Portal K.UTB
Čeština
Login
TBU Catalog
e-resources
E-THESES
All Fields
Title
Author
Subject
Find
Advanced Search
Search Results - "LAM, HIEU A"
Showing
1 - 20
results of
68
for search '
"LAM, HIEU A"
'
, query time: 0.85s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
1
Loading…
Method of monitoring a processing system
by
LAM
,
Hieu
,
A
,
YUE, Hongyu
Year of Publication
07.06.2017
Get full text
Patent
Save to List
Saved in:
2
Loading…
Method and apparatus for determining an etch property using an endpoint signal
by
Yue, Hongyu
,
Lam
,
Hieu A
Year of Publication
01.11.2011
Get full text
Patent
Save to List
Saved in:
3
Loading…
Method and apparatus for determining an etch property using an endpoint signal
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
01.11.2011
Get full text
Patent
Save to List
Saved in:
4
Loading…
A PROCESS SYSTEM HEALTH INDEX AND METHOD OF USING THE SAME
by
YUE, HONGYU
,
LAM
,
HIEU
,
A
Year of Publication
09.03.2011
Get full text
Patent
Save to List
Saved in:
5
Loading…
Process system health index and method of using the same
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
11.05.2010
Get full text
Patent
Save to List
Saved in:
6
Loading…
Process system health index and method of using the same
by
Yue, Hongyu
,
Lam
,
Hieu A
Year of Publication
11.05.2010
Get full text
Patent
Save to List
Saved in:
7
Loading…
METHOD AND SYSTEM FOR CONTROLLING PROCESS BY USING MATERIAL PROCESS-TOOL AND PERFORMANCE DATA
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
22.04.2010
Get full text
Patent
Save to List
Saved in:
8
Loading…
Method and apparatus for using a pressure control system to monitor a plasma processing system
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
30.09.2008
Get full text
Patent
Save to List
Saved in:
9
Loading…
Method and apparatus for using a pressure control system to monitor a plasma processing system
by
Yue, Hongyu
,
Lam
,
Hieu A
Year of Publication
30.09.2008
Get full text
Patent
Save to List
Saved in:
10
Loading…
Method and system for predicting process performance using material processing tool and sensor data
by
Lam
,
Hieu A
,
Yue, Hongyu
,
Shriner, John
Year of Publication
30.11.2010
Get full text
Patent
Save to List
Saved in:
11
Loading…
Method and system for predicting process performance using material processing tool and sensor data
by
YUE HONGYU
,
SHRINER JOHN
,
LAM HIEU A
Year of Publication
30.11.2010
Get full text
Patent
Save to List
Saved in:
12
Loading…
Method and system of discriminating substrate type
by
Lam
,
Hieu A
,
Yue, Hongyu
Year of Publication
01.05.2007
Get full text
Patent
Save to List
Saved in:
13
Loading…
Method and system of discriminating substrate type
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
01.05.2007
Get full text
Patent
Save to List
Saved in:
14
Loading…
METHOD OF DOUBLE PATTERNING USING SACRIFICIAL STRUCTURE
by
NIINO REIJI
,
YUE HONGYU
,
LAM HIEU A
Year of Publication
17.12.2009
Get full text
Patent
Save to List
Saved in:
15
Loading…
Controlling a material processing tool and performance data
by
Lam
,
Hieu A
,
Yue, Hongyu
Year of Publication
23.01.2007
Get full text
Patent
Save to List
Saved in:
16
Loading…
Controlling a material processing tool and performance data
by
YUE HONGYU
,
LAM HIEU A
Year of Publication
23.01.2007
Get full text
Patent
Save to List
Saved in:
17
Loading…
A process system health index and method of using the same
by
LAM
,
HIEU A
,
YUE, HONGYU
Year of Publication
11.10.2006
Get full text
Patent
Save to List
Saved in:
18
Loading…
Process system health index and method of using the same
by
YUE HONGYU,
LAM HIEU A
Year of Publication
16.08.2006
Get full text
Patent
Save to List
Saved in:
19
Loading…
METHOD AND SYSTEM FOR PREDICTING PROCESS PERFORMANCE USING MATERIAL PROCESSING TOOL AND SENSOR DATA
by
YUE HONGYU
,
SHRINER JOHN
,
LAM HIEU A
Year of Publication
16.04.2009
Get full text
Patent
Save to List
Saved in:
20
Loading…
Method of monitoring a processing system
by
YUE, HONGYU
,
LAM
,
HIEU
,
A
Year of Publication
29.03.2006
Get full text
Patent
Save to List
Saved in:
1
2
3
4
Next
[4]
RSS Feed
Email Search
Save Search
Search History
Back
Refine Results
Page will reload when a filter is selected or excluded.
Limit to articles from scholarly journals
Limit to articles with full text available
Limit to Open Access content
Exclude newspaper articles
Include articles at other libraries
Expand results using synonyms
Format
Patent
68 results
68
Subject Area
chemistry
60 results
60
medicine
60 results
60
sciences
60 results
60
physics
41 results
41
Topic
electricity
51 results
51
basic electric elements
49 results
49
physics
41 results
41
electric discharge tubes or discharge lamps
39 results
39
electric solid state devices not otherwise provided for
37 results
37
semiconductor devices
37 results
37
See more
Language
English
68 results
68
French
16 results
16
Chinese
8 results
8
German
4 results
4
Year of Publication
From:
To:
Database
esp@cenet
60 results
60
USPTO Issued Patents
8 results
8
