Calibration Of Parametric Measurement Models Based On In-Line Wafer Measurement Data
Wu, Song, Zhan, Tianrong, Lagodzinski, Andrew, Lin, Brian C, Chiu, Emily, Wu, David
Year of Publication 28.03.2024
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Year of Publication 28.03.2024
Patent
CALIBRATION OF PARAMETRIC MEASUREMENT MODELS BASED ON IN-LINE WAFER MEASUREMENT DATA
WU, David, WU, Song, LAGODZINSKI, Andrew, CHIU, Emily, ZHAN, Tianrong, LIN, Brian C
Year of Publication 04.04.2024
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Year of Publication 04.04.2024
Patent
Calibration of parametric measurement models based on in-line wafer measurement data
LAGODZINSKI, ANDREW, ZHAN, TIAN-RONG, CHIU, EMILY ZHU-HAN, LIN, BRIAN JIA-HUI, WU, DAVID JUN-SHENG, WU, SONG
Year of Publication 16.05.2024
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Year of Publication 16.05.2024
Patent