Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling
Fomenkov, Igor, Brandt, David, Ershov, Alex, Schafgans, Alexander, Tao, Yezheng, Vaschenko, Georgiy, Rokitski, Slava, Kats, Michael, Vargas, Michael, Purvis, Michael, Rafac, Rob, La Fontaine, Bruno, De Dea, Silvia, LaForge, Andrew, Stewart, Jayson, Chang, Steven, Graham, Matthew, Riggs, Daniel, Taylor, Ted, Abraham, Mathew, Brown, Daniel
Published in Advanced optical technologies (27.06.2017)
Published in Advanced optical technologies (27.06.2017)
Get full text
Journal Article
Synthesis and magnetic properties of a 3-D nickel hydroxide capped by succinate
Fei, Honghan, LaForge, Andrew D., Onyango, Tedmann M., Robins, Jeremy C., Zavalij, Peter Y., Ramirez, Arthur P., Oliver, Scott R. J.
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2013)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (01.01.2013)
Get full text
Journal Article
EXTREME ULTRAVIOLET LIGHT SOURCE
ARCHAND JASON M, PURVIS MICHAEL A, STEWART JOHN TOM. IV, JUR JORDAN, TAO YEZHENG, SCHAFGANS ALEXANDER A, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 05.01.2023
Get full text
Year of Publication 05.01.2023
Patent
광학 요소용 산소 손실 내성 상부 코팅
MAYER PETER MATTHEW, MA YUE, ZHU QIUSHI, HUMMLER KLAUS MARTIN, BROWN DANIEL JOHN WILLIAM, VAN DE KERKHOF MARCUS ADRIANUS, FOMENKOV IGOR VLADIMIROVICH, LAFORGE ANDREW DAVID, HOFFMANN KAY
Year of Publication 15.03.2022
Get full text
Year of Publication 15.03.2022
Patent
Magnetic exchange interaction between rare-earth and Mn ions in multiferroic hexagonal manganites
Talbayev, D, LaForge, A D, Trugman, S A, Hur, N, Taylor, A J, Averitt, R D, Basov, D N
Published in Physical review letters (12.12.2008)
Published in Physical review letters (12.12.2008)
Get more information
Journal Article
EUV 리소그래피 시스템 내에서의 광학 요소 수명 연장
ERSHOV ALEXANDER IGOREVICH, WESTERLAKEN JAN STEVEN CHRISTIAAN, JACOBS JOHANNES HENRICUS WILHELMUS, ROMMERS JEROEN HUBERT, VAN DIJCK HENDRIKUS ALPHONSUS LUDOVICUS, YAGHOOBI PARHAM, KEMPEN ANTONIUS THEODORUS WILHELMUS, FOMENKOV IGOR VLADIMIROVICH, KUZNETSOV ALEXEY SERGEEVICH, DUARTE RODRIGUES NUNES RUI MIGUEL, LAFORGE ANDREW DAVID, VAN DRENT WILLIAM PETER, BRIZUELA FERNANDO, WIEGGERS ROB CARLO, KIM ALEXANDER DOWNN, MOORS JOHANNES HUBERTUS JOSEPHINA, GOMES UMESH PRASAD, LEENDERS MARTINUS HENDRIKUS ANTONIUS, MA YUE, ZHU QIUSHI, HUMMLER KLAUS MARTIN, LIU FEI, NEDANOVSKA ELENA, KORKMAZ CELAL, JONKERS PETER GERARDUS, VAN DE WIEL HUBERTUS JOHANNES
Year of Publication 05.11.2020
Get full text
Year of Publication 05.11.2020
Patent
안내 장치 및 관련 시스템
ERSHOV ALEXANDER IGOREVICH, MOJAB SEYEDMOHAMMAD, NADIR KERIM, STEWART JOHN TOM, XIA CHUNGUANG, LABETSKI DZMITRY, DUARTE RODRIGES NUNES RUI MIGUEL, FEENSTRA KORNELIS FRITS, JOHNKADAKSHAM ARUN, KRAUSHAAR MATTHIAS, MA YUE, TEGENBOSCH HENRICUS GERARDUS, BERENDSEN CHRISTIANUS WILHELMUS JOHANNES, HUMMLER KLAUS MARTIN, FOMENKOV IGOR VLADIMIROVICH, LOGINOV MAKSIM, LANGLOIS MARC GUY, SHATALOV ALEXANDER, LAFORGE ANDREW DAVID
Year of Publication 04.09.2019
Get full text
Year of Publication 04.09.2019
Patent
EXTREME ULTRAVIOLET LIGHT SOURCE
ARCHAND JASON M, PURVIS MICHAEL A, STEWART JOHN TOM. IV, JUR JORDAN, TAO YEZHENG, SCHAFGANS ALEXANDER A, BROWN DANIEL, LAFORGE ANDREW
Year of Publication 17.03.2017
Get full text
Year of Publication 17.03.2017
Patent
CONTAINERS FOR PROTECTING SEMICONDUCTOR DEVICES AND RELATED METHODS
Ditali, Mohamed A, Veches, Anthony D, Laforge, Andrew F, Leavitt, Michael D
Year of Publication 21.07.2022
Get full text
Year of Publication 21.07.2022
Patent