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"LACY, MICHAEL, S"
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"LACY, MICHAEL, S"
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
by
MICHAEL S
.
LACY
,
ABANESHWAR PRASAD
Year of Publication
31.05.2011
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Patent
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Students of arms : a survey of arms and armour study in Great in Britain from the eighteenth century to the First World War
by
Lacy
,
Michael S
Year of Publication
1999
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Dissertation
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Multi-layer polishing pad material for CMP
by
LACY MICHAEL S
,
PRASAD ABANESHWAR
Year of Publication
14.10.2008
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Patent
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Multi-layer polishing pad material for CMP
by
Prasad, Abaneshwar
,
Lacy
,
Michael S
Year of Publication
14.10.2008
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Patent
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Multi-layer polishing pad material for CMP
by
PRASAD, ABANESHWAR
,
LACY
,
MICHAEL
,
S
,
SEVILLA, ROLAND, K
Year of Publication
01.05.2013
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Patent
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Method for manufacturing a reclaimable test pattern wafer for CMP applications
by
LACY MICHAEL S
Year of Publication
26.10.2004
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Patent
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Method for manufacturing a reclaimable test pattern wafer for CMP applications
by
Lacy
,
Michael S
Year of Publication
26.10.2004
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Patent
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Method and apparatus for conditioning a polishing pad with sonic energy
by
LACY MICHAEL S
Year of Publication
29.04.2003
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Patent
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Method and apparatus for conditioning a polishing pad with sonic energy
by
Lacy
,
Michael S
Year of Publication
29.04.2003
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Patent
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Method and apparatus for conditioning a polishing pad with sonic energy
by
LACY MICHAEL S
Year of Publication
04.07.2002
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Patent
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Multi-layer polishing pad material for CMP
by
LACY MICHAEL S
,
PRASAD ABANESHWAR
Year of Publication
08.09.2005
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Patent
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
by
SEVILLA, ROLAND K
,
PRASAD, ABANESHWAR
,
LACY
,
MICHAEL S
Year of Publication
27.02.2009
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Patent
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Multi-layer polishing pad material for CMP
by
PRASAD, ABANESHWAR
,
LACY
,
MICHAEL
,
S
,
SEVILLA, ROLAND, K
Year of Publication
18.02.2009
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Patent
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
by
PRASAD, ABANESHWAR
,
LACY
,
MICHAEL
,
S
,
SEVILLA, ROLAND, K
Year of Publication
10.12.2008
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Patent
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Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection
by
LACY MICHAEL S
,
BOYD JOHN M
Year of Publication
11.10.2005
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Apparatus and method for providing a signal port in a polishing pad for optical endpoint detection
by
Boyd, John M
,
Lacy
,
Michael S
Year of Publication
11.10.2005
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Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool
by
LACY MICHAEL S
,
BOYD JOHN M
Year of Publication
30.08.2005
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Patent
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Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool
by
Boyd, John M
,
Lacy
,
Michael S
Year of Publication
30.08.2005
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Patent
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Polishing pad and its manufacture method, a polishing device and polishing method
by
LACY MICHAEL S
,
PRASAD ABANESHWAR
Year of Publication
19.05.2010
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MULTI-LAYER POLISHING PAD MATERIAL FOR CMP
by
ROLAND K. SEVILLA
,
MICHAEL S
.
LACY
,
ABANESHWAR PRASAD
Year of Publication
31.12.2007
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dressing or conditioning of abrading surfaces
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feeding of grinding, polishing, or lapping agents
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grinding
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machines, devices, or processes for grinding or polishing
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