(Invited) Germanium Enrichment for Planar-, Fin- and Nanowire-Channel MOSFETs Made on SOI
Augendre, Emmanuel, Loubet, Nicolas, Morin, Pierre Francois, Liu, Qing, Schmitt, Joël, L'Herron, Benoît, Nguyen, Phuong, Barraud, Sylvain, Hutin, Louis, Maitrejean, Sylvain, De Salvo, Barbara, Coquand, Rémi, Reboh, Shay, Venigalla, Rajasekhar, Doris, Bruce, Yamashita, Tenko, Faynot, Olivier, Vinet, Maud
Published in ECS transactions (18.08.2016)
Published in ECS transactions (18.08.2016)
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Journal Article
(Invited) Germanium Enrichment for Planar-, Fin- and Nanowire-Channel MOSFETs Made on SOI
Augendre, Emmanuel, Loubet, Nicolas, Morin, Pierre Francois, Liu, Qing, Schmitt, Joël, L'Herron, Benoît, Nguyen, Phuong, Barraud, Sylvain, Hutin, Louis, Maitrejean, Sylvain, De Salvo, Barbara, Coquand, Rémi, Reboh, Shay, Venigalla, Rajasekhar, Doris, Bruce, Yamashita, Tenko, Faynot, Olivier, Vinet, Maud
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
Published in Meeting abstracts (Electrochemical Society) (01.09.2016)
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Journal Article
Silicon-Germanium (SiGe) composition and thickness determination via simultaneous smallspot XPS and XRF measurements
L'herron, Benoit, Loubet, Nicolas, Qing Liu, Wei Ti Lee, Klare, Mark, Pois, Heath, Kwan, Mike, Ying Wang, Larson, Tom, Farhat, Saiqa, Fullam, Jennifer, Gaudiello, John, Rangarajan, Srinivasan, Bing Sun, Wacquez, Romain, Maitrejean, Sylvian
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
Published in 25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014) (01.05.2014)
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Conference Proceeding