Investigation on Metal Pillar Defect in sub-micron CMOS Technology
Young Seon You, Nam Sung Kim, Wong Wing Yew, Eng Keong Ho, Chun Peng Chua, Yang Bum Lee, Kwang Leong Se, Dong Ju Son, Shukla, D., Mukhopadhyay, M., Kin San Pey
Published in 2006 IEEE International Symposium on Semiconductor Manufacturing (01.09.2006)
Published in 2006 IEEE International Symposium on Semiconductor Manufacturing (01.09.2006)
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Conference Proceeding
Minimizing Charging Potential during Passivation Etch
Yue, K.H.K., Tay Chin Tiong, James, S.K.L., Goh Boon Kiat
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
Published in 2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2008)
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Conference Proceeding
Optical spectral emission endpoint detection for passivation etch
Hong Kenneth, Yue Kok, Seng, Chin Chye, Tay, Chin Tiong, Leong James, Se Kwang, Goh, Boon Kiat
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
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Conference Proceeding