Optimization of FINFET Single Diffusion Break Structure Profile
Kwan, ChunPui, Shen, HongLiang, Ashokmani, Sen, Gao, LeZhong, Dineen, Cassidy, Vijay Mane, Vishvajeet, Dayanga, Thilina, Sloan, Cameron
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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Conference Proceeding
Fin Reveal RIE Process Investigation
Kwan, ChunPui, Shen, Hongliang, Reis, Edward, Dineen, Cassidy, Nguyen, Tu Q., Li, Lillian, Lifshitz, Yevgeny, Brown, Robert, Yang, Lan, He, Xiaoli, Chen, James
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
Published in 2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2023)
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Conference Proceeding