Photo-induced atomic layer deposition of tantalum oxide thin films from Ta(OC2H5)5 and O2
LEE, Young-Hoon, KWAK, Jae-Chan, GANG, Bong-Suck, KIM, Hie-Chul, CHOI, Byung-Ho, JEONG, Bong-Kyo, PARK, Sung-Ho, LEE, Kyuoung-Ho
Published in Journal of the Electrochemical Society (2004)
Published in Journal of the Electrochemical Society (2004)
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Journal Article
Apparatus for Processing Substrate
CHO, YONG JIN, KIM, YOO SEONG, JEON, JU SEOK, KIM, BEOM JUN, KWAK, JAE CHAN
Year of Publication 19.12.2017
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Year of Publication 19.12.2017
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