Resistance Switching Peculiarities in Nonfilamentary Self‐Rectified TiN/Ta2O5/Ta and TiN/HfO2/Ta2O5/Ta Stacks
Kuzmichev, Dmitry S., Chernikova, Anna G., Kozodaev, Maxim G., Markeev, Andrey M.
Published in Physica status solidi. A, Applications and materials science (01.09.2020)
Published in Physica status solidi. A, Applications and materials science (01.09.2020)
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In Situ Control of Oxygen Vacancies in TaOx Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
Egorov, Konstantin V, Kuzmichev, Dmitry S, Chizhov, Pavel S, Lebedinskii, Yuri Yu, Hwang, Cheol Seong, Markeev, Andrey M
Published in ACS applied materials & interfaces (19.04.2017)
Published in ACS applied materials & interfaces (19.04.2017)
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Journal Article
In Situ Control of Oxygen Vacancies in TaO x Thin Films via Plasma-Enhanced Atomic Layer Deposition for Resistive Switching Memory Applications
Egorov, Konstantin V, Kuzmichev, Dmitry S, Chizhov, Pavel S, Lebedinskii, Yuri Yu, Hwang, Cheol Seong, Markeev, Andrey M
Published in ACS applied materials & interfaces (19.04.2017)
Published in ACS applied materials & interfaces (19.04.2017)
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Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency control
Egorov, Konstantin V, Kuzmichev, Dmitry S, Sigarev, Andrey A, Myakota, Denis I, Zarubin, Sergey S, Chizov, Pavel S, Perevalov, Timofey V, Gritsenko, Vladimir A, Hwang, Cheol Seong, Markeev, Andrey M
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
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Journal Article
Resistance Switching Peculiarities in Nonfilamentary Self‐Rectified TiN/Ta 2 O 5 /Ta and TiN/HfO 2 /Ta 2 O 5 /Ta Stacks
Kuzmichev, Dmitry S., Chernikova, Anna G., Kozodaev, Maxim G., Markeev, Andrey M.
Published in Physica status solidi. A, Applications and materials science (01.09.2020)
Published in Physica status solidi. A, Applications and materials science (01.09.2020)
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Effect of Electrode Nanopatterning on the Functional Properties of Ta/TaO x /Pt Resistive Memory Devices
Zhuk, Maksim Yu, Sizykh, Nikita A., Kuzmichev, Dmitry S., Chouprik, Anastasia A., Zarubin, Sergei S., Gornev, Evgeny S., Zenkevich, Andrei V.
Published in ACS applied nano materials (24.06.2022)
Published in ACS applied nano materials (24.06.2022)
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Hydrogen radical enhanced atomic layer deposition of TaOx: saturation studies and methods for oxygen deficiency controlElectronic supplementary information (ESI) available. See DOI: 10.1039/c8tc00679b
Egorov, Konstantin V, Kuzmichev, Dmitry S, Sigarev, Andrey A, Myakota, Denis I, Zarubin, Sergey S, Chizov, Pavel S, Perevalov, Timofey V, Gritsenko, Vladimir A, Hwang, Cheol Seong, Markeev, Andrey M
Year of Publication 20.09.2018
Year of Publication 20.09.2018
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Journal Article
Hydrogen radical enhanced atomic layer deposition of TaO x : saturation studies and methods for oxygen deficiency control
Egorov, Konstantin V., Kuzmichev, Dmitry S., Sigarev, Andrey A., Myakota, Denis I., Zarubin, Sergey S., Chizov, Pavel S., Perevalov, Timofey V., Gritsenko, Vladimir A., Hwang, Cheol Seong, Markeev, Andrey M.
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (2018)
Get full text
Journal Article