DRAM cell characterization by AC-impedance measurement
Mühlhoff, H.-M., Dietl, J., Kusztelan, L.
Published in ESSDERC '91: 21st European Solid State Device Research Conference (1991)
Published in ESSDERC '91: 21st European Solid State Device Research Conference (1991)
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Journal Article
Conference Proceeding
Failure of zirconium silicide contacts during the silicidation process studied by AES and RBS
Brooks, WS, Derry, TE, Sellschop, JPF, Cooperthwaite, RG, Kusztelan, L, Lutsch, AGK
Published in Vacuum (1988)
Published in Vacuum (1988)
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Journal Article
Buried stacked capacitor cells for 16M and 64M DRAMS
Dietl, J, DoThanh, L, Kusters, K H, Kusztelan, L, Mulhoff, H M, Muller, W, Stelz, F X
Published in ESSDERC '90: 20th European Solid State Device Research Conference (01.09.1990)
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Published in ESSDERC '90: 20th European Solid State Device Research Conference (01.09.1990)
Conference Proceeding
Leakage Current Limitations of Trench Cell for 16M DRAMs
Roehl, S., Kusztelan, L., Kuepper, P., Hasler, B.
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
Published in ESSDERC '89: 19th European Solid State Device Research Conference (01.09.1989)
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Conference Proceeding