Electrical characterization of thin silicon-on-insulator films doped by means of phosphorus end-terminated polymers
Pulici, Andrea, Kuschlan, Stefano, Seguini, Gabriele, Taglietti, Fabiana, Fanciulli, Marco, Chiarcos, Riccardo, Laus, Michele, Perego, Michele
Published in Materials science in semiconductor processing (15.08.2023)
Published in Materials science in semiconductor processing (15.08.2023)
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Journal Article
Periodic Arrays of Dopants in Silicon by Ultralow Energy Implantation of Phosphorus Ions through a Block Copolymer Thin Film
Kuschlan, Stefano, Chiarcos, Riccardo, Laus, Michele, Pérez-Murano, Francesc, Llobet, Jordi, Fernandez-Regulez, Marta, Bonafos, Caroline, Perego, Michele, Seguini, Gabriele, De Michielis, Marco, Tallarida, Graziella
Published in ACS applied materials & interfaces (20.12.2023)
Published in ACS applied materials & interfaces (20.12.2023)
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Journal Article
Donor incomplete ionization and mobility enhancement in ultra-thin silicon-on-insulator films doped by phosphorus end-terminated polymers
Pulici, Andrea, Kuschlan, Stefano, Seguini, Gabriele, De Michielis, Marco, Chiarcos, Riccardo, Laus, Michele, Fanciulli, Marco, Perego, Michele
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (14.10.2024)
Published in Journal of materials chemistry. C, Materials for optical and electronic devices (14.10.2024)
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Journal Article
Silicon Doping by Polymer Grafting: Size Distribution Matters
Perego, Michele, Kuschlan, Stefano, Seguini, Gabriele, Chiarcos, Riccardo, Gianotti, Valentina, Antonioli, Diego, Sparnacci, Katia, Laus, Michele
Published in ACS applied polymer materials (10.12.2021)
Published in ACS applied polymer materials (10.12.2021)
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Journal Article
Brush Layers of Bioinspired Polypeptoids for Deterministic Doping of Semiconductors
Ospina, Viviana Maria, Chiarcos, Riccardo, Antonioli, Diego, Gianotti, Valentina, Laus, Michele, Kuschlan, Stefano, Wiemer, Claudia, Perego, Michele
Published in ACS applied electronic materials (27.12.2022)
Published in ACS applied electronic materials (27.12.2022)
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Journal Article
Electrical Characterization of Ultra-Thin Silicon-on-Insulator Films Doped By Means of Phosphorus End-Terminated Polymers
Pulici, Andrea, Kuschlan, Stefano, Seguini, Gabriele, Taglietti, Fabiana, Fanciulli, Marco, Chiarcos, Riccardo, Laus, Michele, Perego, Michele
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
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Journal Article
Phosphorus Deactivation and Electron Mobility Enhancement in Ultrathin Silicon Nanosheets
Perego, Michele, Pulici, Andrea, Kuschlan, Stefano, Seguini, Gabriele, Taglietti, Fabiana, Fanciulli, Marco, Chiarcos, Riccardo, Laus, Michele
Published in 2023 Silicon Nanoelectronics Workshop (SNW) (11.06.2023)
Published in 2023 Silicon Nanoelectronics Workshop (SNW) (11.06.2023)
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Conference Proceeding
Nanoscale Periodic Modulation of Doping over Large Areas with Block Copolymer Lithography and Ion Implantation
Kuschlan, Stefano, Gianotti, Valentina, Laus, Michele, Pérez-Murano, Francesc, Llobet, Jordi, Fernandez-Regulez, Marta, Bonafos, Caroline, Perego, Michele, Seguini, Gabriele, De Michielis, Marco, Tallarida, Graziella
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
Published in Meeting abstracts (Electrochemical Society) (22.12.2023)
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Journal Article