Elastic modulus and coefficient of thermal expansion of piezoelectric Al1−xScxN (up to x = 0.41) thin films
Lu, Yuan, Reusch, Markus, Kurz, Nicolas, Ding, Anli, Christoph, Tim, Prescher, Mario, Kirste, Lutz, Ambacher, Oliver, Žukauskaitė, Agnė
Published in APL materials (01.07.2018)
Published in APL materials (01.07.2018)
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Journal Article
Optical constants and band gap of wurtzite Al1−xScxN/Al2O3 prepared by magnetron sputter epitaxy for scandium concentrations up to x = 0.41
Baeumler, Martina, Lu, Yuan, Kurz, Nicolas, Kirste, Lutz, Prescher, Mario, Christoph, Tim, Wagner, Joachim, Žukauskaitė, Agnė, Ambacher, Oliver
Published in Journal of applied physics (28.07.2019)
Published in Journal of applied physics (28.07.2019)
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Journal Article
Surface Morphology and Microstructure of Pulsed DC Magnetron Sputtered Piezoelectric AlN and AlScN Thin Films
Lu, Yuan, Reusch, Markus, Kurz, Nicolas, Ding, Anli, Christoph, Tim, Kirste, Lutz, Lebedev, Vadim, Žukauskaitė, Agnė
Published in Physica status solidi. A, Applications and materials science (09.05.2018)
Published in Physica status solidi. A, Applications and materials science (09.05.2018)
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Journal Article
Enhanced electromechanical coupling in SAW resonators based on sputtered non-polar Al0.77Sc0.23N 11 2 ¯ 0 thin films
Ding, Anli, Kirste, Lutz, Lu, Yuan, Driad, Rachid, Kurz, Nicolas, Lebedev, Vadim, Christoph, Tim, Feil, Niclas M., Lozar, Roger, Metzger, Thomas, Ambacher, Oliver, Žukauskaitė, Agnė
Published in Applied physics letters (09.03.2020)
Published in Applied physics letters (09.03.2020)
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Journal Article
Temperature Cross-Sensitivity of AlN-Based Flexural Plate Wave Sensors
Reusch, Markus, Holc, Katarzyna, Lebedev, Vadim, Kurz, Nicolas, Zukauskaite, Agne, Ambacher, Oliver
Published in IEEE sensors journal (01.10.2018)
Published in IEEE sensors journal (01.10.2018)
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Journal Article
Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling
Parsapour, Fazel, Pashchenko, Vladimir, Kurz, Nicolas, Sandu, Cosmin Silviu, LaGrange, Thomas, Yamashita, Kaoru, Lebedev, Vadim, Muralt, Paul
Published in Advanced electronic materials (01.05.2019)
Published in Advanced electronic materials (01.05.2019)
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Journal Article
Elastic modulus and coefficient of thermal expansion of piezoelectric Al 1−x Sc x N (up to x = 0.41) thin films
Lu, Yuan, Reusch, Markus, Kurz, Nicolas, Ding, Anli, Christoph, Tim, Prescher, Mario, Kirste, Lutz, Ambacher, Oliver, Žukauskaitė, Agnė
Published in APL materials (01.07.2018)
Published in APL materials (01.07.2018)
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Journal Article
Flexural plate wave sensors with buried IDT for sensing in liquids
Reusch, Markus, Holc, Katarzyna, Zukauskaite, Agne, Lebedev, Vadim, Kurz, Nicolas, Ambacher, Oliver
Published in 2017 IEEE SENSORS (01.10.2017)
Published in 2017 IEEE SENSORS (01.10.2017)
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Conference Proceeding
Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films
Feil, Niclas M., Kurz, Nicolas, Urban, Daniel F., Altayara, Abdullah, Christian, Bjoern, Ding, Anli, Zukauskaite, Agne, Ambacher, Oliver
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding
Investigation of Temperature Characteristics and Substrate Influence on AlScN-Based SAW Resonators
Ding, Anli, Reusch, Markus, Lu, Yuan, Kurz, Nicolas, Lozar, Roger, Christoph, Tim, Driad, Rachid, Ambacher, Oliver, Zukauskaite, Agne
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
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Conference Proceeding
Experimental determination of Al1-xScxN thin film thermo-electro-acoustic properties up to 140°C by using SAW resonators
Ding, Anli, Kurz, Nicolas, Driad, Rachid, Lu, Yuan, Lozar, Roger, Christoph, Tim, Kirste, Lutz, Ambacher, Oliver, Zukauskaite, Agne
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
Published in 2019 IEEE International Ultrasonics Symposium (IUS) (01.10.2019)
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Conference Proceeding
Determination of Elastic and Piezoelectric Properties of Al0.84Sc0.16N Thin Films
Kurz, Nicolas, Parsapour, Fazel, Pashchenko, Vladimir, Kirste, Lutz, Lebedev, Vadim, Muralt, Paul, Ambacher, Oliver, Pascal, Nicolay
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
Published in 2018 IEEE International Ultrasonics Symposium (IUS) (01.10.2018)
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Conference Proceeding
Ex-situ AlN seed layer for (0001)-textured Al0.84Sc0.16N thin films grown on SiO2 substrates
Parsapour, Fazel, Pashchenko, Vladimir, Mertin, Stefan, Sandu, Cosmin, Kurz, Nicolas, Nicolay, Pascal, Muralt, Paul
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
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Conference Proceeding
Ex-situ AlN seed layer for (0001)-textured Al0.85Sc0.15N thin films grown on SiO2 substrates for shear mode resonators
Kolour, Mohammad Fazel Parsapour, Sandu, Cosmin, Pashchenko, Vladimir, Mertin, Stefan, Kurz, Nicolas, Nicolay, Pascal, Muralt, Paul
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
Published in 2017 IEEE International Ultrasonics Symposium (IUS) (01.09.2017)
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Conference Proceeding