CMP characteristics of quartz glass substrate by aggregated colloidal ceria slurry
Wakamatsu, Kaito, Kurokawa, Syuhei, Toyama, Takaaki, Hayashi, Terutake
Published in Precision engineering (01.11.2019)
Published in Precision engineering (01.11.2019)
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Journal Article
Characteristics and effectiveness of the face gear with transmission-error-controlled curve considering the path of contact (Effect of assembly and manufacturing errors on transmission error)
INOUE, Tetsuo, KUROKAWA, Syuhei
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2023)
Published in Journal of Advanced Mechanical Design, Systems, and Manufacturing (01.01.2023)
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Journal Article
The Polishing Effect of SiC Substrates in Femtosecond Laser Irradiation Assisted Chemical Mechanical Polishing (CMP)
Wang, Chengwu, Kurokawa, Syuhei, Doi, Toshiro, Yuan, Julong, Sano, Yasuhisa, Aida, Hideo, Zhang, Kehua, Deng, Qianfa
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
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Journal Article
Machinability of SMART Forging Process Materials in Intermittent Cutting: 2nd Report : Machinability in Normal Cutting Region and Selection of Optimum Cutting Condition
Murata, Mitsuaki, Hino, Makoto, Kuwano, Ryoichi, Kurokawa, Syuhei
Published in E3S Web of Conferences (01.01.2019)
Published in E3S Web of Conferences (01.01.2019)
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Journal Article
Conference Proceeding
Surface Morphology Evolution Induced by Multiple Femtosecond Laser Ablation on 4H-SiC Substrate and Its Application to CMP
Wang, Chengwu, Kurokawa, Syuhei, Doi, Toshiro, Yuan, Julong, Lv, Binghai, Zhang, Kehua
Published in ECS journal of solid state science and technology (01.01.2017)
Published in ECS journal of solid state science and technology (01.01.2017)
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Journal Article
Whole outline scanning measurement of internal gear by using CNC gear measuring machine
Kurokawa, Syuhei, Utsunomiya, Yuuki, Hayashi, Terutake, Taguchi, Tetsuya, Matsuoka, Ryota
Published in MATEC Web of Conferences (2019)
Published in MATEC Web of Conferences (2019)
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Journal Article
Conference Proceeding