Effect of Plasma Oxygen Content on the Size and Content of Silicon Nanoclusters in Amorphous SiOx Films Obtained with Plasma-Enhanced Chemical Vapor Deposition
Terekhov, Vladimir A., Terukov, Evgeniy I., Undalov, Yurii K., Barkov, Konstantin A., Kurilo, Nikolay A., Ivkov, Sergey A., Nesterov, Dmitry N., Seredin, Pavel V., Goloshchapov, Dmitry L., Minakov, Dmitriy A., Popova, Elena V., Lukin, Anatoly N., Trapeznikova, Irina N.
Published in Symmetry (Basel) (01.09.2023)
Published in Symmetry (Basel) (01.09.2023)
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Investigations of Nanoscale Columnar Al[sub.x]Ga[sub.1-x]N/AlN Heterostructures Grown on Silicon Substrates with Different Modifications of the Surface
Seredin, Pavel Vladimirovich, Kurilo, Nikolay, Goloshchapov, Dmitry L, Kashkarov, Vladimir, Lenshin, Aleksandr S, Buylov, Nikita, Nesterov, Dmitry, Mizerov, Andrey, Kukushkin, Sergey A, Timoshnev, S, Shubina, K. Yu, Sobolev, M. S
Published in Photonics (01.10.2023)
Published in Photonics (01.10.2023)
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Study of semi-polar gallium nitride grown on m-sapphire by chloride vapor-phase epitaxy
Seredin, P. V., Kurilo, N. A., Radam, Ali O., Builov, N. S., Goloshchapov, D. L., Ivkov, S. A., Lenshin, A. S., Arsentiev, I. N., Nashchekin, A. V., Sharofldinov, Sh. Sh, Mizerov, A. M., Sobolev, M. S., Pirogov, E. V., Semeykin, I. V.
Published in Kondensirovannye sredy i mežfaznye granicy (2023)
Published in Kondensirovannye sredy i mežfaznye granicy (2023)
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